Combined EUV reflectance and X-ray reflectivity data analysis of periodic multilayer structures SN Yakunin, IA Makhotkin, KV Nikolaev, RWE Van De Kruijs, MA Chuev, ... Optics express 22 (17), 20076-20086, 2014 | 50 | 2014 |
Low-energy ion polishing of Si in W/Si soft X-ray multilayer structures RV Medvedev, KV Nikolaev, AA Zameshin, D IJpes, IA Makhotkin, ... Journal of Applied Physics 126 (4), 2019 | 24 | 2019 |
Simultaneous dimensional and analytical characterization of ordered nanostructures P Hönicke, Y Kayser, KV Nikolaev, V Soltwisch, JE Scheerder, ... Small 18 (6), 2105776, 2022 | 17 | 2022 |
Grazing incidence-x-ray fluorescence for a dimensional and compositional characterization of well-ordered 2D and 3D nanostructures P Hönicke, A Andrle, Y Kayser, KV Nikolaev, J Probst, F Scholze, ... Nanotechnology 31 (50), 505709, 2020 | 15 | 2020 |
Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers KV Nikolaev, SN Yakunin, IA Makhotkin, J Rie, RV Medvedev, ... Acta Crystallographica Section A: Foundations and Advances 75 (2), 342-351, 2019 | 12 | 2019 |
A semi-analytical approach for the characterization of ordered 3D nanostructures using grazing-incidence X-ray fluorescence KV Nikolaev, V Soltwisch, P Hönicke, F Scholze, J de La Rie, SN Yakunin, ... Journal of synchrotron radiation 27 (2), 386-395, 2020 | 11 | 2020 |
Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold IA Makhotkin, I Milov, J Chalupský, K Tiedtke, H Enkisch, G de Vries, ... JOSA B 35 (11), 2799-2805, 2018 | 7 | 2018 |
Hydrogenation dynamics of Ru capped Y thin films O Soroka, JM Sturm, RWE Van De Kruijs, IA Makhotkin, K Nikolaev, ... Journal of Applied Physics 126 (14), 2019 | 4 | 2019 |
Challenges of grazing emission X-ray fluorescence (GEXRF) for the characterization of advanced nanostructured surfaces D Skroblin, AF Herrero, T Siefke, K Nikolaev, A Andrle, P Hönicke, ... Nanoscale 14 (41), 15475-15483, 2022 | 2 | 2022 |
Multi-dimensional analysis of nano-scale periodic structures using EUV and X-RAY characterization: theoretical concepts and applications K Nikolaev | 2 | 2019 |
Investigation of physical properties of Si crystallites in W/Si multilayers NI Chkhalo, SA Garakhin, N Kumar, KV Nikolaev, VN Polkovnikov, ... Journal of Applied Crystallography 55 (6), 1455-1464, 2022 | 1 | 2022 |
Sensitivity analysis for the detection of pitchwalk in self-aligned quadruple patterning by GISAXS MC Zapata, N Farchmin, M Pflüger, K Nikolaev, V Soltwisch, ... Metrology, inspection, and process control for microlithography XXXIV 11325 …, 2020 | 1 | 2020 |
Optical and structural characterization of orthorhombic LaLuO3 using extreme ultraviolet reflectometry M Tryus, KV Nikolaev, IA Makhotkin, J Schubert, L Kibkalo, S Danylyuk, ... Thin solid films 680, 94-101, 2019 | 1 | 2019 |
Grazing-emission X-ray fluorescence as a multiprobe tool for thin-film metrology KV Nikolaev, AI Safonov, OA Kondratev, GV Prutskov, IA Likhachev, ... Journal of Applied Crystallography 56 (5), 2023 | | 2023 |
Phase Retrieval Algorithm for Reconstructing the Structure of Magnetic Domains Using Dichroic Coherent Diffractive Imaging: Numerical Examples MC Antonov, KV Nikolaev, SN Yakunin Crystallography Reports 67 (6), 851-859, 2022 | | 2022 |
Specular reflection intensity modulated by grazing-incidence diffraction in a wide angular range KV Nikolaev, IA Makhotkin, SN Yakunin, RWE Kruijs, MA Chuev, F Bijkerk Acta Crystallographica Section A: Foundations and Advances 74 (5), 545-552, 2018 | | 2018 |