| EUV sources for lithography V Bakshi SPIE press, 2006 | 413 | 2006 |
| EUV sources using Xe and Sn discharge plasmas VM Borisov, AV Eltsov, AS Ivanov, YB Kiryukhin, OB Khristoforov, ... Journal of Physics D: Applied Physics 37 (23), 3254, 2004 | 94 | 2004 |
| The study of silicon films obtained by sequential lateral solidification by means of a 3-kHz excimer laser with a sheetlike beam AB Limanov, VA Chubarenko, VM Borisov, AY Vinokhodov, AI Demin, ... Russian Microelectronics 28 (1), 25-33, 1999 | 52 | 1999 |
| Expansion and fragmentation of a liquid-metal droplet by a short laser pulse SY Grigoryev, BV Lakatosh, MS Krivokorytov, VV Zhakhovsky, ... Physical Review Applied 10 (6), 064009, 2018 | 49 | 2018 |
| Development of linear sequential lateral solidification technique to fabricate quasi-single-crystal super-thin si films for high-performance thin film transistor devices AB Limanov, VM Borisov, AY Vinokhodov, AI Demin, AI El’tsov, ... Perspectives, Science and Technologies for Novel Silicon on Insulator …, 2000 | 46 | 2000 |
| Single-Axis Projection Scheme for Conducting Sequential Lateral Solidifica-tion of Si Films for Large-Area Electronics A Limanov, V Borisov MRS Online Proceedings Library (OPL) 685, D10. 1.1, 2001 | 45 | 2001 |
| Fragmentation dynamics of liquid–metal droplets under ultra-short laser pulses M M Basko, M S Krivokorytov, A Yu Vinokhodov, Yu V Sidelnikov, V M Krivtsun ... Laser Phys. Lett 14 (036001), 2017 | 43 | 2017 |
| Cavitation and spallation in liquid metal droplets produced by subpicosecond pulsed laser radiation VVM M. S. Krivokorytov,A. Yu. Vinokhodov,Yu. V. Sidelnikov,V. M. Krivtsun,V ... PHYSICAL REVIEW E 95, 031101(R)-1-6, 2017 | 38 | 2017 |
| Pumping rate of electric-discharge excimer lasers VM Borisov, IE Bragin, AY Vinokhodov, VA Vodchits Quantum Electronics 25 (6), 507, 1995 | 37 | 1995 |
| Stable droplet generator for a high brightness laser produced plasma extreme ultraviolet source A Vinokhodov, M Krivokorytov, Y Sidelnikov, V Krivtsun, V Medvedev, ... Review of Scientific Instruments 87 (10), 2016 | 31 | 2016 |
| Effects limiting the average power of compact pulse-periodic KrF lasers VM Borisov, AV Borisov, IE Bragin, AY Vinokhodov Quantum electronics 25 (5), 421, 1995 | 31 | 1995 |
| High-power EUV sources for lithography: a comparison of laser-produced plasma and gas-discharge-produced plasma U Stamm, I Ahmad, VM Borisov, F Flohrer, K Gaebel, S Götze, AS Ivanov, ... Emerging Lithographic Technologies VI 4688, 122-133, 2002 | 30 | 2002 |
| Formation of a fine-dispersed liquid-metal target under the action of femto-and picosecond laser pulses for a laser-plasma radiation source in the extreme ultraviolet range AY Vinokhodov, KN Koshelev, VN Krivtsun, MS Krivokorytov, ... Quantum Electronics 46 (1), 23, 2016 | 29 | 2016 |
| Compact Z-pinch EUV source for photolithography G Schriever, M Rahe, U Stamm, D Basting, OB Khristoforov, ... Emerging Lithographic Technologies V 4343, 615-620, 2001 | 27 | 2001 |
| Shaping and controlled fragmentation of liquid metal droplets through cavitation MS Krivokorytov, Q Zeng, BV Lakatosh, AY Vinokhodov, YV Sidelnikov, ... Scientific reports 8 (1), 597, 2018 | 26 | 2018 |
| Development of high-power EUV sources for lithography VM Borisov, I Ahmad, S Goetze, AS Ivanov, OB Khristoforov, ... Emerging Lithographic Technologies VI 4688, 626-633, 2002 | 26 | 2002 |
| High power EUV sources based on gas discharge plasmas and laser produced plasmas G Schriever, U Stamm, K Gäbel, M Darscht, V Borisov, O Khristoforov, ... Microelectronic engineering 61, 83-88, 2002 | 22 | 2002 |
| Increase in the repetition frequency of XeCl laser pulses to 1 kHz VY Baranov, VM Borisov, AY Vinokhodov, FI Vysikaĭlo, YB Kiryukhin Soviet Journal of Quantum Electronics 14 (4), 558, 1984 | 21 | 1984 |
| Kilowatt-range high-repetition-rate excimer lasers VM Borisov, OB Khristoforov, YB Kirykhin, SG Kuznetsov, YY Stepanov, ... Excimer Lasers and Applications III 1503, 40-47, 1991 | 20 | 1991 |
| Droplet-based, high-brightness extreme ultraviolet laser plasma source for metrology AY Vinokhodov, MS Krivokorytov, YV Sidelnikov, VM Krivtsun, ... Journal of Applied Physics 120 (16), 2016 | 18 | 2016 |
