| EUV-induced plasma: A peculiar phenomenon of a modern lithographic technology J Beckers, T van de Ven, R van der Horst, D Astakhov, V Banine Applied Sciences 9 (14), 2827, 2019 | 56 | 2019 |
| Ion energy distributions in highly transient EUV induced plasma in hydrogen THM Van De Ven, P Reefman, CA De Meijere, RM Van Der Horst, ... Journal of Applied Physics 123 (6), 2018 | 49 | 2018 |
| Mass spectrometry study of the temperature dependence of Pt film growth by atomic layer deposition IJM Erkens, AJM Mackus, HCM Knoops, P Smits, THM Van de Ven, ... ECS Journal of Solid State Science and Technology 1 (6), P255, 2012 | 36 | 2012 |
| Analysis of retarding field energy analyzer transmission by simulation of ion trajectories THM Van De Ven, CA De Meijere, RM Van Der Horst, M Van Kampen, ... Review of Scientific Instruments 89 (4), 2018 | 23 | 2018 |
| Ion fluxes towards surfaces exposed to EUV-induced plasmas THM van de Ven | 16 | 2018 |
| Energy distribution functions for ions from pulsed EUV-induced plasmas in low pressure N2-diluted H2 gas J Beckers, THM Van de Ven, CA De Meijere, RM Van der Horst, ... Applied Physics Letters 114 (13), 2019 | 13 | 2019 |
| Radiating plasma species density distribution in EUV-induced plasma in argon: a spatiotemporal experimental study RM Van Der Horst, J Beckers, EA Osorio, THM Van De Ven, VY Banine Plasma Sources Science and Technology 24 (6), 065016, 2015 | 10 | 2015 |
| Time-resolved ion energy distribution functions in the afterglow of an EUV-induced plasma J Beckers, THM Van De Ven, VY Banine Applied Physics Letters 115 (18), 2019 | 6 | 2019 |
| Validation of an atomic hydrogen etching sensor for plasma diagnostics D Van Leuken, CA de Meijere, J Beckers, T van de Ven Eindhoven, 2018 | 1 | 2018 |
| Investigation of ion energy distribution functions in EUV-induced plasmas by ion mass spectrometry THM van de Ven, P Reefman, EA Osorio, VY Banine, J Beckers 2016 IEEE International Conference on Plasma Science (ICOPS), 1-1, 2016 | 1 | 2016 |
| Ion fluxes and energies increase with pressure in EUV-induced H2 plasmas THM van de Ven, P Reefman, CA de Meijere, R van der Horst, VY Banine, ... 69th Annual Gaseous Electronics Conference (GEC 2016), October 10-14, 2016 …, 2016 | | 2016 |
| Influence of pressure on ion energy distribution functions in EUV-induced hydrogen plasmas THM van de Ven, P Reefman, CA de Meijere, VY Banine, J Beckers APS Annual Gaseous Electronics Meeting Abstracts, HT6. 005, 2016 | | 2016 |
| First-ever measurements of ion energy distribution functions in EUV induced plasma THM van de Ven, P Reefman, EA Osorio, VY Banine, J Beckers 28th NNV Symposium on Plasma Physics and Radiation Technology, March 15-16 …, 2016 | | 2016 |
| Absolute calibration of an energy resolved ion mass spectrometer and Retarding Field Energy Analyzer THM van de Ven, VY Banine, EA Osorio, J Beckers 18th Euregional Workshop on the Exploration of Low Temperature Plasma …, 2015 | | 2015 |
| Energy resolved mass spectrometry in EUV-induced plasmas THM van de Ven, J Beckers, EA Osorio, VY Banine 27th NNV Symposium on Plasma Physics and Radiation Technology, 2015 | | 2015 |
| Ion energies in EUV induced plasma: Measuring methods THM van de Ven, J Beckers, EA Osorio, VY Banine, GMW Kroesen 17th Euregional Workshop on the Exploration of Low Temperature Plasma …, 2014 | | 2014 |
| Spectroscopic study of the spark for Spark-OES THM van de Ven, S Nijdam, GMW Kroesen 26th NNV Spring Symposium for Plasma Physics & Radiation Technology …, 2014 | | 2014 |
| Hydrogen peroxide production using ambient pressure microplasmas CA Vasko, THM van de Ven, PJ Bruggeman Presentation at the 12th European Plasma Conference, 24-29 June 2012 …, 2012 | | 2012 |
