Megapixel CMOS image sensor fabricated in three-dimensional integrated circuit technology V Suntharalingam, R Berger, JA Burns, CK Chen, CL Keast, JM Knecht, ... ISSCC. 2005 IEEE International Digest of Technical Papers. Solid-State …, 2005 | 361 | 2005 |
A wafer-scale 3-D circuit integration technology JA Burns, BF Aull, CK Chen, CL Chen, CL Keast, JM Knecht, ... IEEE Transactions on Electron Devices 53 (10), 2507-2516, 2006 | 339 | 2006 |
3D integrated superconducting qubits D Rosenberg, D Kim, R Das, D Yost, S Gustavsson, D Hover, P Krantz, ... npj quantum information 3 (1), 42, 2017 | 164 | 2017 |
High-speed Schottky-barrier pMOSFET with f/sub T/= 280 GHz M Fritze, CL Chen, S Calawa, D Yost, B Wheeler, P Wyatt, CL Keast, ... IEEE Electron Device Letters 25 (4), 220-222, 2004 | 108 | 2004 |
Qubit and coupler circuit structures and coupling techniques WD Oliver, AJ Kerman, RN Das, DRW Yost, D Rosenberg, MA Gouker US Patent 10,134,972, 2018 | 87 | 2018 |
100-nm node lithography with KrF? M Fritze, B Tyrrell, DK Astolfi, D Yost, P Davis, B Wheeler, RD Mallen, ... Optical Microlithography XIV 4346, 191-204, 2001 | 83 | 2001 |
Laser radar imager based on 3D integration of Geiger-mode avalanche photodiodes with two SOI timing circuit layers B Aull, J Burns, C Chen, B Felton, H Hanson, C Keast, J Knecht, A Loomis, ... 2006 IEEE International Solid State Circuits Conference-Digest of Technical …, 2006 | 74 | 2006 |
Low-temperature oxide-bonded three-dimensional integrated circuits K Warner, J Burns, C Keast, R Kunz, D Lennon, A Loomis, W Mowers, ... Proceedings of the IEEE International SOI Conference, 123-125, 2002 | 73 | 2002 |
Solid-state qubits integrated with superconducting through-silicon vias DRW Yost, ME Schwartz, J Mallek, D Rosenberg, C Stull, JL Yoder, ... npj Quantum Information 6 (1), 59, 2020 | 63 | 2020 |
Interconnect structures and methods for fabricating interconnect structures WD Oliver, AJ Kerman, RN Das, DRW Yost, D Rosenberg, MA Gouker US Patent 10,121,754, 2018 | 48 | 2018 |
High-performance fully-depleted SOI RF CMOS CL Chen, SJ Spector, RM Blumgold, RA Neidhard, WT Beard, DR Yost, ... IEEE Electron Device Letters 23 (1), 52-54, 2002 | 46 | 2002 |
Interconnect structures for assembly of semiconductor structures including superconducting integrated circuits WD Oliver, AJ Kerman, RN Das, DRW Yost, D Rosenberg, MA Gouker US Patent 10,396,269, 2019 | 42 | 2019 |
Subwavelength optical lithography with phase-shift photomasks M Fritze, BM Tyrrell, DK Astolfi, RD Lambert, DRW Yost, AR Forte, ... Lincoln Laboratory Journal 14 (2), 237-250, 2003 | 42 | 2003 |
Low polarization dependent diffraction grating for wavelength demultimlexing E Popov, J Hoose, B Frankel, C Keast, M Fritze, TY Fan, D Yost, S Rabe Optics Express 12 (2), 269-275, 2004 | 40 | 2004 |
Solid-state qubits: 3D integration and packaging D Rosenberg, SJ Weber, D Conway, DRW Yost, J Mallek, G Calusine, ... IEEE Microwave Magazine 21 (8), 72-85, 2020 | 33 | 2020 |
Cryogenic qubit integration for quantum computing RN Das, JL Yoder, D Rosenberg, DK Kim, D Yost, J Mallek, D Hover, ... 2018 IEEE 68th Electronic Components and Technology Conference (ECTC), 504-514, 2018 | 30 | 2018 |
Wafer-scale 3D integration of InGaAs image sensors with Si readout circuits CL Chen, DR Yost, JM Knecht, DC Chapman, DC Oakley, LJ Mahoney, ... 2009 IEEE International Conference on 3D System Integration, 1-4, 2009 | 25 | 2009 |
Gratings of regular arrays and trim exposures for ultralarge scale integrated circuit phase-shift lithography M Fritze, B Tyrrell, D Astolfi, D Yost, P Davis, B Wheeler, R Mallen, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2001 | 25 | 2001 |
Laser radar imager based on three-dimensional integration of Geiger-mode avalanche photodiodes with two SOI timing-circuit layers B Aull, J Burns, C Chen, B Felton, H Hanson, C Keast, J Knecht, A Loomis, ... ISSCC Dig. Tech. Papers, 304-305, 2006 | 22 | 2006 |
Sub-100 nm silicon on insulator complimentary metal–oxide semiconductor transistors by deep ultraviolet optical lithography M Fritze, J Burns, PW Wyatt, CK Chen, P Gouker, CL Chen, C Keast, ... Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000 | 21 | 2000 |