A multiscale assembly and packaging system for manufacturing of complex micro-nano devices AN Das, R Murthy, DO Popa, HE Stephanou
IEEE Transactions on Automation Science and Engineering 9 (1), 160-170, 2011
99 2011 Selective epitaxial germanium on silicon-on-insulator high speed photodetectors using low-temperature ultrathin Si0. 8Ge0. 2 buffer TH Loh, HS Nguyen, R Murthy, MB Yu, WY Loh, GQ Lo, ...
Applied Physics Letters 91 (7), 2007
77 2007 Enhanced microfiltration devices configured with hydrodynamic trapping and a rain drop bypass filtering architecture for microbial cells detection C Lay, CY Teo, L Zhu, XL Peh, HM Ji, BR Chew, R Murthy, HH Feng, ...
Lab on a Chip 8 (5), 830-833, 2008
47 2008 DO Popa, R Murthy, AN Das
IEEE Transactions on Automation Science and Engineering 6 (2), 345-361, 2009
43 2009 ARRIpede: A stick-slip micro crawler/conveyor robot constructed via 2 ½D MEMS assembly R Murthy, A Das, DO Popa
2008 IEEE/RSJ International Conference on Intelligent Robots and Systems, 34-40, 2008
32 2008 TSV Cu filling failure modes and mechanisms causing the failures JW Choi, OL Guan, M Yingjun, HBM Yusoff, X Jielin, CC Lan, WL Loh, ...
IEEE Transactions on Components, Packaging and Manufacturing Technology 4 (4 …, 2014
31 2014 Impact of packaging design on reliability of large die Cu/low-κ (BD) interconnect TC Chai, X Zhang, HY Li, VN Sekhar, WY Hnin, ML Thew, OK Navas, ...
2008 58th Electronic Components and Technology Conference, 38-45, 2008
30 * 2008 Precise motion control of a piezoelectric microgripper for microspectrometer assembly K Rabenorosoa, C Cle´ vy, P Lutz, AN Das, R Murthy, D Popa
International Design Engineering Technical Conferences and Computers and …, 2009
29 2009 AFAM: An articulated four axes microrobot for nanoscale applications R Murthy, HE Stephanou, DO Popa
IEEE Transactions on Automation Science and Engineering 10 (2), 276-284, 2012
27 2012 ARRIpede: An assembled die-scale microcrawler R Murthy, AN Das, DO Popa, HE Stephanou
Advanced Robotics 25 (8), 965-990, 2011
27 2011 Semiconductor device and production method thereof F Masuoka, S Arai, H Nakamura, T Kudo, RR MURTHY, S Nansheng, ...
US Patent 8,466,512, 2013
25 2013 High‐Yield Automated MEMS Assembly DO Popa, HE Stephanou
Robotic Microassembly, 253-278, 2010
20 2010 Polysilicon interconnections (FEOL): Fabrication and characterization A Agarwal, RB Murthy, V Lee, G Viswanadam
2009 11th Electronics Packaging Technology Conference, 317-320, 2009
20 2009 M3-modular multi-scale assembly system for MEMS packaging D Popa, R Murthy, M Mittal, J Sin, H Stephanou
2006 IEEE/RSJ International Conference on Intelligent Robots and Systems …, 2006
19 2006 A four degree of freedom microrobot with large work volume R Murthy, DO Popa
2009 IEEE International Conference on Robotics and Automation, 1028-1033, 2009
17 2009 ARRIpede: an assembled micro crawler R Murthy, AN Das, DO Popa
2008 8th IEEE Conference on Nanotechnology, 833-836, 2008
17 2008 Multiscale robotics framework for MEMS assembly R Murthy, A Das, D Popa
2006 9th International Conference on Control, Automation, Robotics and …, 2006
12 2006 Semiconductor device and production method thereof F Masuoka, S Arai, H Nakamura, T Kudo, RR MURTHY, S Nansheng, ...
US Patent 8,563,379, 2013
10 2013 Millimeter-scale microrobots for wafer-level factories R Murthy, DO Popa
2010 IEEE International Conference on Robotics and Automation, 488-493, 2010
10 2010 High yield assembly of compliant MEMS snap fasteners R Murthy, AN Das, DO Popa
International Design Engineering Technical Conferences and Computers and …, 2008
10 2008 