| Enabling sub-10nm node lithography: presenting the NXE: 3400B EUV scanner M van de Kerkhof, H Jasper, L Levasier, R Peeters, R van Es, JW Bosker, ... Extreme Ultraviolet (EUV) Lithography VIII 10143, 34-47, 2017 | 108 | 2017 |
| Magnetostatic interactions on a square lattice A Remhof, A Schumann, A Westphalen, H Zabel, N Mikuszeit, ... Physical Review B 77 (13), 134409, 2008 | 100 | 2008 |
| Mitigation of mask three-dimensional induced phase effects by absorber optimization in ArFi and extreme ultraviolet lithography J Finders, L Winter, T Last Journal of Micro/Nanolithography, MEMS, and MOEMS 15 (2), 021408-021408, 2016 | 46 | 2016 |
| Magnetization reversal of microstructured kagome lattices A Westphalen, A Schumann, A Remhof, H Zabel, M Karolak, B Baxevanis, ... Physical Review B 77 (17), 174407, 2008 | 44 | 2008 |
| Contrast optimization for 0.33 NA EUV lithography J Finders, S Wuister, T Last, G Rispens, E Psari, J Lubkoll, E van Setten, ... Extreme Ultraviolet (EUV) Lithography VII 9776, 487-495, 2016 | 33 | 2016 |
| Structural, chemical, and magnetic properties of Fe films grown on InAs (100) L Ruppel, G Witte, C Wöll, T Last, SF Fischer, U Kunze Physical Review B 66 (24), 245307, 2002 | 28 | 2002 |
| Magnetotransport study of nanoscale permalloy–Si tunnelling structures in lateral spin-valve geometry S Hacia, T Last, SF Fischer, U Kunze Journal of Physics D: Applied Physics 37 (9), 1310, 2004 | 26 | 2004 |
| Quantum Inspire: QuTech’s platform for co-development and collaboration in quantum computing T Last, N Samkharadze, P Eendebak, R Versluis, X Xue, A Sammak, ... Novel patterning technologies for semiconductors, MEMS/NEMS and MOEMS 2020 …, 2020 | 25 | 2020 |
| Understanding the litho-impact of phase due to 3D mask effects when using off-axis illumination L de Winter, T Last, N Davydova, J Finders 31st European Mask and Lithography Conference 2015 9661 (Proc. SPIE), 96610A, 2015 | 22 | 2015 |
| Optimization of nanopatterned permalloy electrodes for a lateral hybrid spin-valve structure T Last, S Hacia, M Wahle, SF Fischer, U Kunze Journal of applied physics 96 (11), 6706-6711, 2004 | 20 | 2004 |
| Suppressed spin dephasing for two-dimensional and bulk electrons in GaAs wires due to engineered cancellation of spin-orbit interaction terms SZ Denega, T Last, J Liu, A Slachter, PJ Rizo, PHM van Loosdrecht, ... Physical Review B 81 (15), 153302, 2010 | 19 | 2010 |
| Magnetization reversal of equilateral Fe triangles A Westphalen, A Schumann, A Remhof, H Zabel, T Last, U Kunze Physical Review B 74 (10), 104417, 2006 | 17 | 2006 |
| Imaging enhancement by reduction of mask topography induced phase aberrations for horizontal 1D spaces under D90Y illumination T Last, L de Winter, J Finders Photomask Technology 2015 9635 (Proc. SPIE), 96350K, 2015 | 16 | 2015 |
| Accelerating quantum computer developments GJN Alberts, MA Rol, T Last, BW Broer, CC Bultink, MSC Rijlaarsdam, ... EPJ Quantum Technology 8 (1), 18, 2021 | 15 | 2021 |
| Study of Spin-Valve Operation in Permalloy–SiO2–Silicon Nanostructures S Hacia, T Last, SF Fischer, U Kunze Journal of superconductivity 16, 187-190, 2003 | 12 | 2003 |
| Illumination pupil optimization in 0.33-NA extreme ultraviolet lithography by intensity balancing for semi-isolated dark field two-bar M1 building blocks T Last, L de Winter, P van Adrichem, J Finders Journal of Micro/Nanolithography, MEMS, and MOEMS 15 (4), 043508-043508, 2016 | 11 | 2016 |
| Illumination pupil optimization in 0.33NA EUVL by intensity balancing for semi-iso dark field two-bar M1 building blocks T Last, L de Winter, P van Adrichem, J Finders J. Micro/Nanolith. MEMS MOEMS 15 (4), 043508, 2016 | 8 | 2016 |
| Experimental verification of AI decomposition-based source optimization for M1 two-bar building blocks in 0.33 NA EUVL T Last, Z Wang, P Van Adrichem, L de Winter, J Finders Photomask Technology 2016 9985, 73-78, 2016 | 8 | 2016 |
| Dipolar interactions in periodic arrays of rectangular ferromagnetic islands A Remhof, A Schumann, A Westphalen, T Last, U Kunze, H Zabel Journal of Magnetism and Magnetic Materials 310 (2), e794-e796, 2007 | 8 | 2007 |
| Aging phenomena in single nanopatterned permalloy wires T Last, S Hacia, SF Fischer, U Kunze Physica B: Condensed Matter 384 (1-2), 9-11, 2006 | 7 | 2006 |
