| Ultra deep reactive ion etching of high aspect-ratio and thick silicon using a ramped-parameter process Y Tang, A Sandoughsaz, KJ Owen, K Najafi Journal of Microelectromechanical Systems 27 (4), 686-697, 2018 | 72 | 2018 |
| Three-dimensional etching of silicon substrates using a modified deep reactive ion etching technique S Azimi, A Sandoughsaz, B Amirsolaimani, J Naghsh-Nilchi, ... Journal of Micromechanics and Microengineering 21 (7), 074005, 2011 | 34 | 2011 |
| Ultra high aspect-ratio and thick deep silicon etching (UDRIE) Y Tang, A Sandoughsaz, K Najafi 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems …, 2017 | 24 | 2017 |
| A novel non-sequential hydrogen-pulsed deep reactive ion etching of silicon M Gharooni, A Mohajerzadeh, A Sandoughsaz, S Khanof, ... Journal of Micromechanics and Microengineering 23 (9), 095014, 2013 | 17 | 2013 |
| Modular stacked variable-compression micropump and method of making same K Najafi, LP Bernal, SAS Zardini, A Besharatian US Patent 10,563,642, 2020 | 14 | 2020 |
| Realization of complex three-dimensional free-standing structures on silicon substrates using controllable underetching in a deep reactive ion etching A Sandoughsaz, S Azimi, H Mazreati, S Mohajerzadeh Journal of Micromechanics and Microengineering 23 (3), 035022, 2013 | 13 | 2013 |
| Realization of three-dimensional Si and SiO2 nanowall structures using reactive ion etching S Azimi, A Sandoughsaz, S Mohajerzadeh Journal of microelectromechanical systems 20 (2), 353-354, 2011 | 8 | 2011 |
| Sea of Electrodes Array (SEA): Extremely Dense and High-Count Silicon-Based Electrode Array Technology for High-Resolution High-Bandwidth Interfacing with 3D Neural Structures A Sandoughsaz Zardini, B Rostami, K Najafi, VL Hetrick, OJ Ahmed bioRxiv, 2021 | 7 | 2021 |
| Modular stacked variable-compression ratio multi-stage gas micropump A Sandoughsaz, A Besharatian, LP Bernal, K Najafi 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 4 | 2015 |
| A 2kPa per stage and 1.3 sccm flow rate modular two-stage electrostatic gas micropump with stiffened drive electrodes A Sandoughsaz, K Najafi, LP Bernal 2016 IEEE SENSORS, 1-3, 2016 | 3 | 2016 |
| Method of manufacturing a probe array K Najafi, SAS Zardini, D Egert US Patent 11,850,416, 2023 | | 2023 |
| Acknowledgment to Reviewers of Polymers in 2020 PE Office Polymers 13 (3), 2021 | | 2021 |
| Sea of Electrodes Array (SEA): Customizable 3D High-Density High-Count Neural Probe Array Technology SA Sandoughsaz Zardini | | 2019 |
| Ultra-high Aspect Ratio High-speed Silicon Nanowire and Three-dimensional Formation Using a Hydrogen-assisted Deep Reactive Ion Etching Z. Sanaee, S. Azimi, M. Poudineh, S. Mohajerzadeh, A. Sandoughsaz 58th AVS Conference,, 2011 | | 2011 |
| MESSAGE FROM THE CHAIRPERSONS F Labeau, J Gostin | | |
Khalil NajafiProfessor of EECS, University of Michigan
