Fabio Santagata
Fabio Santagata
3nod AcousticLink
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A molybdenum MEMS microhotplate for high-temperature operation
L Mele, F Santagata, E Iervolino, M Mihailovic, T Rossi, AT Tran, ...
Sensors and Actuators A: Physical 188, 173-180, 2012
An all-in-one nanoreactor for high-resolution microscopy on nanomaterials at high pressures
JF Creemer, F Santagata, B Morana, L Mele, T Alan, E Iervolino, ...
2011 IEEE 24th International conference on micro electro mechanical systems …, 2011
An analytical model and verification for MEMS Pirani gauges
F Santagata, E Iervolino, L Mele, AW Van Herwaarden, JF Creemer, ...
Journal of Micromechanics and Microengineering 21 (11), 115007, 2011
Miniaturized particulate matter sensor for portable air quality monitoring devices
X Li, E Iervolino, F Santagata, J Wei, CA Yuan, PM Sarro, GQ Zhang
SENSORS, 2014 IEEE, 2151-2154, 2014
Integrated Virtual Impactor Enabled PM2.5 Sensor
M Dong, E Iervolino, F Santagata, G Zhang, G Zhang
IEEE Sensors Journal 17 (9), 2814-2821, 2017
Mechanical design and characterization for MEMS thin-film packaging
F Santagata, JJM Zaal, VG Huerta, L Mele, JF Creemer, PM Sarro
Journal of microelectromechanical systems 21 (1), 100-109, 2011
Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis
C Silvestri, M Riccio, RH Poelma, B Morana, S Vollebregt, F Santagata, ...
Nanoscale 8 (15), 8266-8275, 2016
A tube-shaped buried Pirani gauge for low detection limit with small footprint
F Santagata, JF Creemer, E Iervolino, L Mele, AW van Herwaarden, ...
Journal of microelectromechanical systems 20 (3), 676-684, 2011
Hydrogen sulfide detection properties of Pt-gated AlGaN/GaN HEMT-sensor
R Sokolovskij, J Zhang, E Iervolino, C Zhao, F Santagata, F Wang, H Yu, ...
Sensors and Actuators B: Chemical 274, 636-644, 2018
Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy
L Mele, F Santagata, G Pandraud, B Morana, FD Tichelaar, JF Creemer, ...
Journal of Micromechanics and Microengineering 20 (8), 085040, 2010
Silicon microfabrication based particulate matter sensor
M Dong, E Iervolino, F Santagata, G Zhang, G Zhang
Sensors and Actuators A: Physical 247, 115-124, 2016
Fully back-end TSV process by Cu electro-less plating for 3D smart sensor systems
F Santagata, C Farriciello, G Fiorentino, HW van Zeijl, C Silvestri, ...
Journal of Micromechanics and Microengineering 01/2013; 23:55014-10, 2013
Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation
F Santagata, JF Creemer, E Iervolino, PM Sarro
Journal of Micromechanics and Microengineering 22 (10), 105025, 2012
A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
B Morana, F Santagata, L Mele, M Mihailović, G Pandraud, JF Creemer, ...
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011
Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity
L Mele, T Rossi, M Riccio, E Iervolino, F Santagata, A Irace, G Breglio, ...
Procedia Engineering 25, 387-390, 2011
Precision recess of AlGaN/GaN with controllable etching rate using ICP-RIE oxidation and wet etching
R Sokolovskij, J Sun, F Santagata, E Iervolino, S Li, GY Zhang, PM Sarro, ...
Procedia engineering 168, 1094-1097, 2016
System in package (SiP) technology: fundamentals, design and applications
F Santagata, J Sun, E Iervolino, H Yu, F Wang, G Zhang, PM Sarro, ...
Microelectronics International 35 (4), 231-243, 2018
Characterization of an Acetone Detector Based on a Suspended WO3-Gate AlGaN/GaN HEMT Integrated With Microheater
J Sun, R Sokolovskij, E Iervolino, F Santagata, Z Liu, PM Sarro, G Zhang
IEEE Transactions on Electron Devices 66 (10), 4373-4379, 2019
3D system-in-package design using stacked silicon submount technology
M Dong, F Santagata, R Sokolovskij, J Wei, C Yuan, G Zhang
Microelectronics International 32 (2), 63-72, 2015
Pt-AlGaN/GaN HEMT-sensor layout optimization for enhancement of hydrogen detection
R Sokolovskij, E Iervolino, C Zhao, F Wang, H Yu, F Santagata, PM Sarro, ...
2017 IEEE sensors, 1-3, 2017
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