Fabio Santagata
Fabio Santagata
3nod AcousticLink
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A molybdenum MEMS microhotplate for high-temperature operation
L Mele, F Santagata, E Iervolino, M Mihailovic, T Rossi, AT Tran, ...
Sensors and Actuators A: Physical 188, 173-180, 2012
682012
An all-in-one nanoreactor for high-resolution microscopy on nanomaterials at high pressures
JF Creemer, F Santagata, B Morana, L Mele, T Alan, E Iervolino, ...
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011
322011
An analytical model and verification for MEMS Pirani gauges
F Santagata, E Iervolino, L Mele, AW Van Herwaarden, JF Creemer, ...
Journal of Micromechanics and Microengineering 21 (11), 115007, 2011
302011
Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy
L Mele, F Santagata, G Pandraud, B Morana, FD Tichelaar, JF Creemer, ...
Journal of Micromechanics and Microengineering 20 (8), 085040, 2010
242010
A tube-shaped buried Pirani gauge for low detection limit with small footprint
F Santagata, JF Creemer, E Iervolino, L Mele, AW van Herwaarden, ...
Journal of microelectromechanical systems 20 (3), 676-684, 2011
232011
Mechanical design and characterization for MEMS thin-film packaging
F Santagata, JJM Zaal, VG Huerta, L Mele, JF Creemer, PM Sarro
Journal of Microelectromechanical systems 21 (1), 100-109, 2011
222011
Miniaturized particulate matter sensor for portable air quality monitoring devices
X Li, E Iervolino, F Santagata, J Wei, CA Yuan, PM Sarro, GQ Zhang
SENSORS, 2014 IEEE, 2151-2154, 2014
202014
Thermal characterization of carbon nanotube foam using MEMS microhotplates and thermographic analysis
C Silvestri, M Riccio, RH Poelma, B Morana, S Vollebregt, F Santagata, ...
Nanoscale 8 (15), 8266-8275, 2016
192016
A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM
B Morana, F Santagata, L Mele, M Mihailović, G Pandraud, JF Creemer, ...
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011
192011
Fully back-end TSV process by Cu electro-less plating for 3D smart sensor systems
F Santagata, C Farriciello, G Fiorentino, HW van Zeijl, C Silvestri, ...
Journal of Micromechanics and Microengineering 01/2013; 23:55014-10, 2013
172013
Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation
F Santagata, JF Creemer, E Iervolino, PM Sarro
Journal of Micromechanics and Microengineering 22 (10), 105025, 2012
152012
Electro-thermal analysis of MEMS microhotplates for the optimization of temperature uniformity
L Mele, T Rossi, M Riccio, E Iervolino, F Santagata, A Irace, G Breglio, ...
Procedia Engineering 25, 387-390, 2011
152011
Silicon microfabrication based particulate matter sensor
M Dong, E Iervolino, F Santagata, G Zhang, G Zhang
Sensors and Actuators A: Physical 247, 115-124, 2016
132016
Integrated Virtual Impactor Enabled PM2.5 Sensor
M Dong, E Iervolino, F Santagata, G Zhang, G Zhang
IEEE Sensors Journal 17 (9), 2814-2821, 2017
122017
Electrothermal effects in bipolar differential pairs
L La Spina, V d'Alessandro, F Santagata, N Rinaldi, LK Nanver
2007 IEEE Bipolar/BiCMOS Circuits and Technology Meeting, 131-134, 2007
102007
Hydrogen sulfide detection properties of Pt-gated AlGaN/GaN HEMT-sensor
R Sokolovskij, J Zhang, E Iervolino, C Zhao, F Santagata, F Wang, H Yu, ...
Sensors and Actuators B: Chemical 274, 636-644, 2018
92018
3D system-in-package design using stacked silicon submount technology
M Dong, F Santagata, R Sokolovskij, J Wei, C Yuan, G Zhang
Microelectronics International, 2015
92015
Potential applications of electron emission membranes in medicine
Y Bilevych, SE Brunner, HW Chan, E Charbon, H van der Graaf, ...
Nuclear Instruments and Methods in Physics Research Section A: Accelerators …, 2016
62016
Precision recess of AlGaN/GaN with controllable etching rate using ICP-RIE oxidation and wet etching
R Sokolovskij, J Sun, F Santagata, E Iervolino, S Li, GY Zhang, PM Sarro, ...
Procedia engineering 168, 1094-1097, 2016
62016
Sputtered molybdenum as conductive material for high-temperature microhotplates
L Mele, F Santagata, E Iervolino, M Mihailovic, T Rossi, AT Tran, ...
2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011
62011
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