Follow
Peter Folmer Nielsen
Peter Folmer Nielsen
Co-Founder & CTO @ CAPRES
Verified email at capres.com - Homepage
Title
Cited by
Cited by
Year
Graphene conductance uniformity mapping
JD Buron, DH Petersen, P Bøggild, DG Cooke, M Hilke, J Sun, ...
Nano letters 12 (10), 5074-5081, 2012
2042012
Nano-drive for high resolution positioning and for positioning of a multi-point probe
CL Petersen, U Quaade, PF Nielsen, F Grey, P Bøggild
US Patent 7,304,486, 2007
1102007
Micro-four-point probe Hall effect measurement method
DH Petersen, O Hansen, R Lin, PF Nielsen
Journal of Applied Physics 104 (1), 2008
1042008
Electrically continuous graphene from single crystal copper verified by terahertz conductance spectroscopy and micro four-point probe
JD Buron, F Pizzocchero, BS Jessen, TJ Booth, PF Nielsen, O Hansen, ...
Nano letters 14 (11), 6348-6355, 2014
1002014
Accurate microfour-point probe sheet resistance measurements on small samples
S Thorsteinsson, F Wang, DH Petersen, TM Hansen, D Kjær, R Lin, ...
Review of Scientific Instruments 80 (5), 2009
832009
Review of electrical characterization of ultra-shallow junctions with micro four-point probes
DH Petersen, O Hansen, TM Hansen, P Bøggild, R Lin, D Kjær, ...
Journal of Vacuum Science & Technology B 28 (1), C1C27-C1C33, 2010
642010
Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
DH Petersen, R Lin, TM Hansen, E Rosseel, W Vandervorst, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
552008
Optimized laser thermal annealing on germanium for high dopant activation and low leakage current
M Shayesteh, D O’Connell, F Gity, P Murphy-Armando, R Yu, K Huet, ...
IEEE Transactions on Electron Devices 61 (12), 4047-4055, 2014
532014
Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing
G Hellings, E Rosseel, E Simoen, D Radisic, DH Petersen, O Hansen, ...
Electrochemical and Solid-State Letters 14 (1), H39, 2010
482010
Defect evolution and dopant activation in laser annealed Si and Ge
F Cristiano, M Shayesteh, R Duffy, K Huet, F Mazzamuto, Y Qiu, M Quillec, ...
Materials Science in Semiconductor Processing 42, 188-195, 2016
472016
Fast and direct measurements of the electrical properties of graphene using micro four-point probes
MB Klarskov, HF Dam, DH Petersen, TM Hansen, A Löwenborg, TJ Booth, ...
Nanotechnology 22 (44), 445702, 2011
462011
On the analysis of the activation mechanisms of sub-melt laser anneals
T Clarysse, J Bogdanowicz, J Goossens, A Moussa, E Rosseel, ...
Materials Science and Engineering: B 154, 24-30, 2008
302008
Systematic study of shallow junction formation on germanium substrates
G Hellings, E Rosseel, T Clarysse, DH Petersen, O Hansen, PF Nielsen, ...
Microelectronic engineering 88 (4), 347-350, 2011
222011
Anomalous activation of shallow B+ implants in Ge
BR Yates, BL Darby, NG Rudawski, KS Jones, DH Petersen, O Hansen, ...
Materials Letters 65 (23-24), 3540-3543, 2011
202011
Breakthrough in current-in-plane tunneling measurement precision by application of multi-variable fitting algorithm
A Cagliani, FW Østerberg, O Hansen, L Shiv, PF Nielsen, DH Petersen
Review of Scientific Instruments 88 (9), 2017
132017
Micro-uniformity during laser anneal: metrology and physics
W Vandervorst, E Rosseel, R Lin, DH Petersen, T Clarysse, J Goossens, ...
MRS Online Proceedings Library (OPL) 1070, 1070-E01-10, 2008
122008
Advanced carrier depth profiling on Si and Ge with micro four-point probe
T Clarysse, P Eyben, B Parmentier, B Van Daele, A Satta, W Vandervorst, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
122008
Ultra low contact resistivity (< 1×10−8Ω-cm2) to In0.53Ga0.47As fin sidewall (110)/(100) surfaces: Realized with a VLSI processed III–V fin TLM structure …
RTP Lee, Y Ohsawa, C Huffman, Y Trickett, G Nakamura, C Hatem, ...
2014 IEEE International Electron Devices Meeting, 32.4. 1-32.4. 4, 2014
112014
Micro-scale sheet resistance measurements on ultra shallow junctions
CL Petersen, R Lin, DH Petersen, PF Nielsen
2006 14th IEEE International Conference on Advanced Thermal Processing of …, 2006
112006
Precision of single-engage micro Hall effect measurements
HH Henrichsen, O Hansen, D Kjaer, PF Nielsen, F Wang, DH Petersen
2014 International Workshop on Junction Technology (IWJT), 1-4, 2014
102014
The system can't perform the operation now. Try again later.
Articles 1–20