P.M. (Lina) Sarro
P.M. (Lina) Sarro
Delft University of Technology, DIMES, The Netherlands
Verified email at tudelft.nl
Cited by
Cited by
Silicon carbide as a new MEMS technology
PM Sarro
Sensors and Actuators A: Physical 82 (1-3), 210-218, 2000
Thermal sensors based on the Seebeck effect
AW Van Herwaarden, PM Sarro
Sensors and Actuators 10 (3-4), 321-346, 1986
Atomic-scale electron microscopy at ambient pressure
JF Creemer, S Helveg, GH Hoveling, S Ullmann, AM Molenbroek, ...
Ultramicroscopy 108 (9), 993-998, 2008
Surface micromachined tuneable interferometer array
K Aratani, PJ French, PM Sarro, D Poenar, RF Wolffenbuttel, ...
Sensors and Actuators A: Physical 43 (1-3), 17-23, 1994
Flexible mirror micromachined in silicon
G Vdovin, PM Sarro
Applied optics 34 (16), 2968-2972, 1995
Optimization of a low-stress silicon nitride process for surface-micromachining applications
PJ French, PM Sarro, R Mallée, EJM Fakkeldij, RF Wolffenbuttel
Sensors and Actuators A: physical 58 (2), 149-157, 1997
Silicon three-axial tactile sensor
Z Chu, PM Sarro, S Middelhoek
Sensors and Actuators A: Physical 54 (1-3), 505-510, 1996
Technology and applications of micromachined silicon adaptive mirrors
GV Vdovin, S Middelhoek, PM Sarro
Optical Engineering 36 (5), 1382-1390, 1997
Low temperature surface passivation for silicon solar cells
C Leguijt, P Lölgen, JA Eikelboom, AW Weeber, FM Schuurmans, ...
Solar Energy Materials and Solar Cells 40 (4), 297-345, 1996
Through-wafer copper electroplating for three-dimensional interconnects
NT Nguyen, E Boellaard, NP Pham, VG Kutchoukov, G Craciun, PM Sarro
Journal of micromechanics and microengineering 12 (4), 395, 2002
Integrated thermopile sensors
AW Van Herwaarden, DC Van Duyn, BW Van Oudheusden, PM Sarro
Sensors and Actuators A: Physical 22 (1-3), 621-630, 1990
Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers
A Berthold, L Nicola, PM Sarro, MJ Vellekoop
Sensors and Actuators A: Physical 82 (1-3), 224-228, 2000
Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications
EJ Connolly, GM O’Halloran, HTM Pham, PM Sarro, PJ French
Sensors and Actuators A: Physical 99 (1-2), 25-30, 2002
Capillary electrophoresis with on‐chip four‐electrode capacitively coupled conductivity detection for application in bioanalysis
RM Guijt, E Baltussen, G van der Steen, H Frank, H Billiet, ...
Electrophoresis 22 (12), 2537-2541, 2001
Spray coating of photoresist for pattern transfer on high topography surfaces
NP Pham, JN Burghartz, PM Sarro
Journal of Micromechanics and Microengineering 15 (4), 691, 2005
On-chip contactless four-electrode conductivity detection for capillary electrophoresis devices
F Laugere, RM Guijt, J Bastemeijer, G van der Steen, A Berthold, ...
Analytical chemistry 75 (2), 306-312, 2003
Silicon thermooptical micromodulator with 700-kHz-3-dB bandwidth
G Cocorullo, M Iodice, I Rendina, PM Sarro
IEEE photonics technology letters 7 (4), 363-365, 1995
Electrothermal microgripper with large jaw displacement and integrated force sensors
TC Duc, GK Lau, JF Creemer, PM Sarro
Journal of microelectromechanical systems 17 (6), 1546-1555, 2008
Polyimide sacrificial layer and novel materials for post-processing surface micromachining
A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro
Journal of Micromechanics and Microengineering 12 (4), 385, 2002
Microfluidic sensor based on integrated optical hollow waveguides
S Campopiano, R Bernini, L Zeni, PM Sarro
Optics letters 29 (16), 1894-1896, 2004
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