P.M. (Lina) Sarro

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Paddy FrenchProfessor, Delft university of technologyVerified email at tudelft.nl
Grégory PandraudOmmatidia-LidarVerified email at ommatidia-lidar.com
Gleb VdovinDirector at OKO TechVerified email at tudelft.nl
Sten VollebregtAssociate professor, Delft University of Technology, Microelectronics Department, The NetherlandsVerified email at tudelft.nl
Chu Duc TrinhProf. VNU University of Engineering and Technology, Vietnam National University, HanoiVerified email at vnu.edu.vn
Bruno MoranaDelft University of TechnologyVerified email at tudelft.nl
Luigi ZeniUniversity of Campania Luigi VanvitelliVerified email at unicampania.it
Romeo BerniniIREA, CNRVerified email at irea.cnr.it
Guo Qi ZhangProfessor, delft university of technologyVerified email at tudelft.nl
Elina IervolinoDelft university of technologyVerified email at tudelft.nl
Enrico SerraINFN Istituto Nazionale di Fisica Nucleare / Technical University of DelftVerified email at tifpa.infn.it
Michele BonaldiIstituto Materiali per Elettronica e Magnetismo (CNR-FBK)Verified email at science.unitn.it
Antonio BorrielliResearcher at Institute of Materials for Electronics and Magnetism (CNR-FBK)- TrentoVerified email at fbk.eu
Gih-Keong LauProfessor of Mechanical Engineering, National Yang Ming Chiao Tung UniversityVerified email at nctu.edu.tw
Massimo MastrangeliAssociate Professor, Delft University of TechnologyVerified email at tudelft.nl
Mario IodiceISASI - CNRVerified email at cnr.it
Luigi MeleSenior Scientist, FEI CompanyVerified email at fei.com
Francesco MarinUniversità di FirenzeVerified email at unifi.it
J.F.L. GoosenAssociate professor, Precision and Microsystem Engineering, Delft University of TechnologyVerified email at tudelft.nl
francesco della corteUniversità degli Studi "Mediterranea" di Reggio CalabriaVerified email at unirc.it

P.M. (Lina) Sarro

Delft University of Technology, The Netherlands

Verified email at tudelft.nl

MEMS/NEMS (Micro/Nano Electro-Mechanical Systems) Organ-on-Chip


Title Sort by citations Sort by year Sort by title	Cited by Cited by	Year
Thermal sensors based on the Seebeck effect AW Van Herwaarden, PM Sarro Sensors and Actuators 10 (3-4), 321-346, 1986	584	1986
Silicon carbide as a new MEMS technology PM Sarro Sensors and Actuators A: Physical 82 (1-3), 210-218, 2000	573	2000
Atomic-scale electron microscopy at ambient pressure JF Creemer, S Helveg, GH Hoveling, S Ullmann, AM Molenbroek, ... Ultramicroscopy 108 (9), 993-998, 2008	411	2008
Surface micromachined tuneable interferometer array K Aratani, PJ French, PM Sarro, D Poenar, RF Wolffenbuttel, ... Sensors and Actuators A: Physical 43 (1-3), 17-23, 1994	299	1994
Flexible mirror micromachined in silicon G Vdovin, PM Sarro Applied optics 34 (16), 2968-2972, 1995	298	1995
Optimization of a low-stress silicon nitride process for surface-micromachining applications PJ French, PM Sarro, R Mallée, EJM Fakkeldij, RF Wolffenbuttel Sensors and Actuators A: physical 58 (2), 149-157, 1997	241	1997
Low temperature surface passivation for silicon solar cells C Leguijt, P Lölgen, JA Eikelboom, AW Weeber, FM Schuurmans, ... Solar Energy Materials and Solar Cells 40 (4), 297-345, 1996	193	1996
Through-wafer copper electroplating for three-dimensional interconnects NT Nguyen, E Boellaard, NP Pham, VG Kutchoukov, G Craciun, PM Sarro Journal of micromechanics and microengineering 12 (4), 395, 2002	186	2002
Integrated thermopile sensors AW Van Herwaarden, DC Van Duyn, BW Van Oudheusden, PM Sarro Sensors and Actuators A: Physical 22 (1-3), 621-630, 1990	184	1990
Technology and applications of micromachined silicon adaptive mirrors GV Vdovin, S Middelhoek, PM Sarro Optical engineering 36 (5), 1382-1390, 1997	178	1997
Silicon three-axial tactile sensor Z Chu, PM Sarro, S Middelhoek Sensors and Actuators A: Physical 54 (1-3), 505-510, 1996	176	1996
Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers A Berthold, L Nicola, PM Sarro, MJ Vellekoop Sensors and Actuators A: Physical 82 (1-3), 224-228, 2000	172	2000
Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications EJ Connolly, GM O’Halloran, HTM Pham, PM Sarro, PJ French Sensors and Actuators A: Physical 99 (1-2), 25-30, 2002	164	2002
Spray coating of photoresist for pattern transfer on high topography surfaces NP Pham, JN Burghartz, PM Sarro Journal of Micromechanics and Microengineering 15 (4), 691, 2005	163	2005
Capillary electrophoresis with on‐chip four‐electrode capacitively coupled conductivity detection for application in bioanalysis RM Guijt, E Baltussen, G van der Steen, H Frank, H Billiet, ... Electrophoresis 22 (12), 2537-2541, 2001	156	2001
On-chip contactless four-electrode conductivity detection for capillary electrophoresis devices F Laugere, RM Guijt, J Bastemeijer, G van der Steen, A Berthold, ... Analytical chemistry 75 (2), 306-312, 2003	146	2003
Polyimide sacrificial layer and novel materials for post-processing surface micromachining A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro Journal of Micromechanics and Microengineering 12 (4), 385, 2002	138	2002
Electrothermal microgripper with large jaw displacement and integrated force sensors TC Duc, GK Lau, JF Creemer, PM Sarro Journal of microelectromechanical systems 17 (6), 1546-1555, 2008	135	2008
Silicon thermooptical micromodulator with 700-kHz-3-dB bandwidth G Cocorullo, M Iodice, I Rendina, PM Sarro IEEE photonics technology letters 7 (4), 363-365, 1995	133	1995
A MEMS reactor for atomic-scale microscopy of nanomaterials under industrially relevant conditions JF Creemer, S Helveg, PJ Kooyman, AM Molenbroek, HW Zandbergen, ... Journal of Microelectromechanical Systems 19 (2), 254-264, 2010	125	2010

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