P.M. (Lina) Sarro

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Paddy FrenchProfessor, Delft university of technologyVerified email at tudelft.nl
Grégory PandraudOmmatidia-LidarVerified email at ommatidia-lidar.com
Gleb VdovinProf. at TU Delft, director at OKO TechVerified email at tudelft.nl
Chu Duc TrinhProf. VNU University of Engineering and Technology, Vietnam National University, HanoiVerified email at vnu.edu.vn
Sten VollebregtAssistant professor, Delft University of Technology, EKL (DIMES), The NetherlandsVerified email at tudelft.nl
Bruno MoranaDelft University of TechnologyVerified email at tudelft.nl
Romeo BerniniIREA, CNRVerified email at irea.cnr.it
Luigi ZeniUniversity of Campania Luigi VanvitelliVerified email at unicampania.it
Elina IervolinoDelft university of technologyVerified email at tudelft.nl
Guo Qi ZhangProfessor, delft university of technologyVerified email at tudelft.nl
Gih-Keong LauProfessor of Mechanical Engineering, National Yang Ming Chiao Tung UniversityVerified email at nctu.edu.tw
Enrico SerraINFN Istituto Nazionale di Fisica Nucleare / Technical University of DelftVerified email at tifpa.infn.it
Michele BonaldiIstituto Materiali per Elettronica e Magnetismo (CNR-FBK)Verified email at science.unitn.it
Antonio BorrielliResearcher at Institute of Materials for Electronics and Magnetism (CNR-FBK)- TrentoVerified email at fbk.eu
J.F.L. GoosenAssistant professor, Precision and Microsystem Engineering, Delft University of TechnologyVerified email at tudelft.nl
Luigi MeleSenior Scientist, FEI CompanyVerified email at fei.com
Mario IodiceISASI - CNRVerified email at cnr.it
Francesco MarinUniversità di FirenzeVerified email at unifi.it
Genni TestaCNR-IREAVerified email at irea.cnr.it
francesco della corteUniversità degli Studi "Mediterranea" di Reggio CalabriaVerified email at unirc.it

P.M. (Lina) Sarro

Delft University of Technology, The Netherlands

Verified email at tudelft.nl

MEMS/NEMS (Micro/Nano Electro-Mechanical Systems) Organ-on-Chip


Title Sort by citations Sort by year Sort by title	Cited by Cited by	Year
Silicon carbide as a new MEMS technology PM Sarro Sensors and Actuators A: Physical 82 (1-3), 210-218, 2000	554	2000
Thermal sensors based on the Seebeck effect AW Van Herwaarden, PM Sarro Sensors and Actuators 10 (3-4), 321-346, 1986	540	1986
Atomic-scale electron microscopy at ambient pressure JF Creemer, S Helveg, GH Hoveling, S Ullmann, AM Molenbroek, ... Ultramicroscopy 108 (9), 993-998, 2008	386	2008
Surface micromachined tuneable interferometer array K Aratani, PJ French, PM Sarro, D Poenar, RF Wolffenbuttel, ... Sensors and Actuators A: Physical 43 (1-3), 17-23, 1994	305	1994
Flexible mirror micromachined in silicon G Vdovin, PM Sarro Applied optics 34 (16), 2968-2972, 1995	293	1995
Optimization of a low-stress silicon nitride process for surface-micromachining applications PJ French, PM Sarro, R Mallée, EJM Fakkeldij, RF Wolffenbuttel Sensors and Actuators A: physical 58 (2), 149-157, 1997	235	1997
Silicon three-axial tactile sensor Z Chu, PM Sarro, S Middelhoek Sensors and Actuators A: Physical 54 (1-3), 505-510, 1996	219	1996
Low temperature surface passivation for silicon solar cells C Leguijt, P Lölgen, JA Eikelboom, AW Weeber, FM Schuurmans, ... Solar Energy Materials and Solar Cells 40 (4), 297-345, 1996	193	1996
Integrated thermopile sensors AW Van Herwaarden, DC Van Duyn, BW Van Oudheusden, PM Sarro Sensors and Actuators A: Physical 22 (1-3), 621-630, 1990	181	1990
Technology and applications of micromachined silicon adaptive mirrors GV Vdovin, S Middelhoek, PM Sarro Optical engineering 36 (5), 1382-1390, 1997	174	1997
Through-wafer copper electroplating for three-dimensional interconnects NT Nguyen, E Boellaard, NP Pham, VG Kutchoukov, G Craciun, PM Sarro Journal of micromechanics and microengineering 12 (4), 395, 2002	172	2002
Glass-to-glass anodic bonding with standard IC technology thin films as intermediate layers A Berthold, L Nicola, PM Sarro, MJ Vellekoop Sensors and Actuators A: Physical 82 (1-3), 224-228, 2000	165	2000
Comparison of porous silicon, porous polysilicon and porous silicon carbide as materials for humidity sensing applications EJ Connolly, GM O’Halloran, HTM Pham, PM Sarro, PJ French Sensors and Actuators A: Physical 99 (1-2), 25-30, 2002	159	2002
Spray coating of photoresist for pattern transfer on high topography surfaces NP Pham, JN Burghartz, PM Sarro Journal of Micromechanics and Microengineering 15 (4), 691, 2005	156	2005
Capillary electrophoresis with on‐chip four‐electrode capacitively coupled conductivity detection for application in bioanalysis RM Guijt, E Baltussen, G van der Steen, H Frank, H Billiet, ... Electrophoresis 22 (12), 2537-2541, 2001	144	2001
On-chip contactless four-electrode conductivity detection for capillary electrophoresis devices F Laugere, RM Guijt, J Bastemeijer, G van der Steen, A Berthold, ... Analytical chemistry 75 (2), 306-312, 2003	138	2003
Polyimide sacrificial layer and novel materials for post-processing surface micromachining A Bagolini, L Pakula, TLM Scholtes, HTM Pham, PJ French, PM Sarro Journal of Micromechanics and Microengineering 12 (4), 385, 2002	136	2002
Electrothermal microgripper with large jaw displacement and integrated force sensors TC Duc, GK Lau, JF Creemer, PM Sarro Journal of microelectromechanical systems 17 (6), 1546-1555, 2008	131	2008
Photoresist coating methods for the integration of novel 3-D RF microstructures NP Pham, E Boellaard, JN Burghartz, PM Sarro Journal of Microelectromechanical Systems 13 (3), 491-499, 2004	126	2004
Silicon thermooptical micromodulator with 700-kHz-3-dB bandwidth G Cocorullo, M Iodice, I Rendina, PM Sarro IEEE photonics technology letters 7 (4), 363-365, 1995	126	1995

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