| Surface micromachined tuneable interferometer array K Aratani, PJ French, PM Sarro, D Poenar, RF Wolffenbuttel, ... Sensors and Actuators A: Physical 43 (1-3), 17-23, 1994 | 299 | 1994 |
| Low-temperature silicon wafer-to-wafer bonding using gold at eutectic temperature RF Wolffenbuttel, KD Wise Sensors and Actuators A: Physical 43 (1-3), 223-229, 1994 | 276 | 1994 |
| State-of-the-art in integrated optical microspectrometers RF Wolffenbuttel IEEE Transactions on Instrumentation and Measurement 53 (1), 197-202, 2004 | 253 | 2004 |
| Low-temperature intermediate Au-Si wafer bonding; eutectic or silicide bond RF Wolffenbuttel Sensors and Actuators A: Physical 62 (1-3), 680-686, 1997 | 247 | 1997 |
| MEMS-based optical mini-and microspectrometers for the visible and infrared spectral range RF Wolffenbuttel Journal of Micromechanics and Microengineering 15 (7), S145, 2005 | 242 | 2005 |
| Optimization of a low-stress silicon nitride process for surface-micromachining applications PJ French, PM Sarro, R Mallée, EJM Fakkeldij, RF Wolffenbuttel Sensors and Actuators A: physical 58 (2), 149-157, 1997 | 229 | 1997 |
| Modeling the mechanical behavior of bulk-micromachined silicon accelerometers RP van Kampen, RF Wolffenbuttel Sensors and Actuators A: Physical 64 (2), 137-150, 1998 | 184 | 1998 |
| Comparison of techniques for measuring both compressive and tensile stress in thin films BP Van Drieënhuizen, JFL Goosen, PJ French, RF Wolffenbuttel Sensors and Actuators A: Physical 37, 756-765, 1993 | 169 | 1993 |
| Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter A Emadi, H Wu, G de Graaf, R Wolffenbuttel Optics express 20 (1), 489-507, 2012 | 161 | 2012 |
| Infrared micro-spectrometer based on a diffraction grating SH Kong, DDL Wijngaards, RF Wolffenbuttel Sensors and actuators A: physical 92 (1-3), 88-95, 2001 | 152 | 2001 |
| Bulk-micromachined tunable Fabry–Perot microinterferometer for the visible spectral range JH Correia, M Bartek, RF Wolffenbuttel Sensors and Actuators A: Physical 76 (1-3), 191-196, 1999 | 102 | 1999 |
| Silicon sensors and circuits: on-chip compatibility RF Wolffenbuttel Springer Science & Business Media, 1996 | 101 | 1996 |
| Single-chip CMOS optical microspectrometer JH Correia, G De Graaf, SH Kong, M Bartek, RF Wolffenbuttel Sensors and Actuators A: Physical 82 (1-3), 191-197, 2000 | 100 | 2000 |
| Application of electrostatic feedback to critical damping of an integrated silicon capacitive accelerometer RP Van Kampen, MJ Vellekoop, PM Sarro, RF Wolffenbuttel Sensors and Actuators A: Physical 43 (1-3), 100-106, 1994 | 95 | 1994 |
| Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices DDL Wijngaards, SH Kong, M Bartek, RF Wolffenbuttel Sensors and Actuators A: Physical 85 (1-3), 316-323, 2000 | 94 | 2000 |
| Integrated grating/detector array fabricated in silicon using micromachining techniques TA Kwa, RF Wolffenbuttel Sensors and Actuators A: Physical 31 (1-3), 259-266, 1992 | 91 | 1992 |
| Analysis and analytical modeling of static pull-in with application to MEMS-based voltage reference and process monitoring LA Rocha, E Cretu, RF Wolffenbuttel Journal of Microelectromechanical systems 13 (2), 342-354, 2004 | 90 | 2004 |
| Vacuum sealing of microcavities using metal evaporation M Bartek, JA Foerster, RF Wolffenbuttel Sensors and Actuators A: Physical 61 (1-3), 364-368, 1997 | 90 | 1997 |
| Process and design considerations for surface micromachined beams for a tuneable interferometer array in silicon K Aratani, PJ French, PM Sarro, RF Wolffenbuttel, S Middelhoek [1993] Proceedings IEEE Micro Electro Mechanical Systems, 230-235, 1993 | 87 | 1993 |
| Micromachined variable capacitors with wide tuning range Z Xiao, W Peng, RF Wolffenbuttel, KR Farmer Sensors and Actuators A: Physical 104 (3), 299-305, 2003 | 83 | 2003 |
