New chamber walls conditioning and cleaning strategies to improve the stability of plasma processes G Cunge, B Pelissier, O Joubert, R Ramos, C Maurice
Plasma Sources Science and Technology 14 (3), 599, 2005
130 2005 No cytotoxicity or genotoxicity of graphene and graphene oxide in murine lung epithelial FE1 cells in vitro S Bengtson, K Kling, AM Madsen, AW Noergaard, NR Jacobsen, ...
Environmental and molecular mutagenesis 57 (6), 469-482, 2016
102 2016 Cleaning aluminum fluoride coatings from plasma reactor walls in SiCl4/Cl2 plasmas R Ramos, G Cunge, B Pelissier, O Joubert
Plasma Sources Science and Technology 16 (4), 711, 2007
73 2007 Etching mechanisms of E Sungauer, E Pargon, X Mellhaoui, R Ramos, G Cunge, L Vallier, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2007
67 2007 Enhanced ionic liquid mobility induced by confinement in 1D CNT membranes Q Berrod, F Ferdeghini, P Judeinstein, N Genevaz, R Ramos, A Fournier, ...
Nanoscale 8 (15), 7845-7848, 2016
61 2016 Gas temperature measurement in CF4, SF6, O2, Cl2, and HBr inductively coupled plasmas G Cunge, R Ramos, D Vempaire, M Touzeau, M Neijbauer, N Sadeghi
Journal of Vacuum Science & Technology A 27 (3), 471-478, 2009
59 2009 Radical surface interactions in industrial silicon plasma etch reactors G Cunge, D Vempaire, R Ramos, M Touzeau, O Joubert, P Bodard, ...
Plasma Sources Science and Technology 19 (3), 034017, 2010
52 2010 Influence of the reactor wall composition on radicals' densities and total pressure in Cl2 inductively coupled plasmas: I. Without silicon etching G Cunge, N Sadeghi, R Ramos
Journal of Applied Physics 102 (9), 2007
41 2007 Influence of the reactor wall composition on radicals’ densities and total pressure in Cl2 inductively coupled plasmas: II. During silicon etching G Cunge, N Sadeghi, R Ramos
Journal of Applied Physics 102 (9), 2007
41 2007 Plasma/reactor walls interactions in advanced gate etching processes R Ramos, G Cunge, O Joubert, N Sadeghi, M Mori, L Vallier
Thin Solid Films 515 (12), 4846-4852, 2007
39 2007 A survey of carbon nanotube interconnects for energy efficient integrated circuits A Todri-Sanial, R Ramos, H Okuno, J Dijon, A Dhavamani, M Widlicenus, ...
IEEE Circuits and Systems Magazine 17 (2), 47-62, 2017
34 2017 Vertically-aligned carbon nanotubes on aluminum as a light-weight positive electrode for lithium-polysulfide batteries S Liatard, K Benhamouda, A Fournier, R Ramos, C Barchasz, J Dijon
Chemical communications 51 (36), 7749-7752, 2015
30 2015 Direct growth of carbon nanotubes forests on carbon fibers to replace microporous layers in proton exchange membrane fuel cells M Fontana, R Ramos, A Morin, J Dijon
Carbon 172, 762-771, 2021
27 2021 Near-field artifacts in tip-enhanced Raman spectroscopy R Ramos, MJ Gordon
Applied Physics Letters 100 (21), 2012
23 2012 Measured velocity distribution of sputtered Al atoms perpendicular and parallel to the target R Ramos, G Cunge, M Touzeau, N Sadeghi
Journal of Physics D: Applied Physics 41 (15), 152003, 2008
21 2008 Absorption spectroscopy in BCl3 inductively coupled plasmas: determination of density, rotational, translational and vibrational temperatures of BCl molecule R Ramos, G Cunge, M Touzeau, N Sadeghi
Journal of Physics D: Applied Physics 41 (11), 115205, 2008
21 2008 High-yield, in-situ fabrication and integration of horizontal carbon nanotube arrays at the wafer scale for robust ammonia sensors H Guerin, H Le Poche, R Pohle, LS Bernard, E Buitrago, R Ramos, ...
Carbon 78, 326-338, 2014
20 2014 On the interest of carbon-coated plasma reactor for advanced gate stack etching processes R Ramos, G Cunge, O Joubert
Journal of Vacuum Science & Technology A 25 (2), 290-303, 2007
18 2007 Plasma reactor dry cleaning strategy after TiN, TaN and HfO2 etching processes R Ramos, G Cunge, O Joubert
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
17 2008 Investigation of Pt-salt-doped-standalone-multiwall carbon nanotubes for on-chip interconnect applications J Liang, R Chen, R Ramos, J Lee, H Okuno, D Kalita, V Georgiev, ...
IEEE Transactions on Electron Devices 66 (5), 2346-2352, 2019
16 2019 