| Air flow sensing using micro-wire-bonded hair-like hot-wire anemometry MM Sadeghi, RL Peterson, K Najafi Journal of Micromechanics and Microengineering 23 (8), 085017, 2013 | 55 | 2013 |
| Micro-hydraulic structure for high performance bio-mimetic air flow sensor arrays MM Sadeghi, RL Peterson, K Najafi 2011 International Electron Devices Meeting, 29.4. 1-29.4. 4, 2011 | 44 | 2011 |
| Hair-based sensors for micro-autonomous systems MM Sadeghi, RL Peterson, K Najafi Proc. SPIE 8373, Micro- and Nanotechnology Sensors, Systems, and …, 2012 | 36* | 2012 |
| Electrostatically driven micro-hydraulic actuator arrays M Sadeghi, H Kim, K Najafi 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010 | 25 | 2010 |
| Three-dimensional microelectromechanical systems structure K Najafi, M Sadeghi, RL Peterson, Y Tang US Patent App. 14/064,098, 2014 | 17 | 2014 |
| Electrostatic micro-hydraulic systems MM Sadeghi, HS Kim, RLB Peterson, K Najafi Journal of Microelectromechanical Systems 25 (3), 557-569, 2016 | 16 | 2016 |
| High-speed electrostatic micro-hydraulics for sensing and actuation MM Sadeghi, RL Peterson, K Najafi 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013 | 14 | 2013 |
| A 2-D directional air flow sensor array made using stereolithography and MEMS micro-hydraulic structures MM Sadeghi, RL Peterson, K Najafi 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 10 | 2013 |
| High sensitivity, high density micro-hydraulic force sensor array utilizing stereo-lithography fabrication technique MM Sadeghi, K Dowling, RL Peterson, K Najafi IEEE Int. Conf. Microelectromechanical Systems (MEMS), Taipei, 673 - 676, 2013 | 9 | 2013 |
| Fluid flow sensor K Najafi, M Sadeghi, RL Peterson US Patent 9,400,197, 2016 | 8 | 2016 |
| Air-flow sensing on autonomous mobile platforms using micro-scale hot-wire anemometry M Sadeghi, RL Peterson, K Peterson, R Fearing, K Najafi 27th Army Science Conference, 2010 | 6 | 2010 |
| Micro-mold fabrication by PET anisotropic ultra-violet assisted etching suitable for 3D structures on Si S Famini, B Fallah, M Sadeghi, M Araghchini, S Mohajerzadeh, ... Sensors and Actuators A: Physical 123, 627-632, 2005 | 2 | 2005 |
| Micro-mold fabrication by PET anisotropic ultra-violet assisted etching suitable for 3D structures on Si S Famini, B Sadeghi-Makki, S Mohajerzadeh, B Fallah, M Sadeghi the 18th European Conference on Solid State Transducers, Eurosensors XVIII, 2004 | 2 | 2004 |
| Micro-hydraulic device K Najafi, M Sadeghi, RL Peterson US Patent 9,502,995, 2016 | 1 | 2016 |
| Managing Stress and Strain to Get the Best Performance in High Precision Tilt/Angle Sensing P Perrault, M Sadeghi Analog Devices, Tech. Rep., 2020.[Online]. Available: https://www. analog …, 0 | 1 | |
| 通过应力和应变管理, 以获得最佳的高精度倾斜/角度传感性能 P Perrault, M Sadeghi 中国集成电路, 2021 | | 2021 |
| A Discrete Model for an Electrostatically Driven Micro-Hydraulic Actuator B Shiari, MM Sadeghi, A Darvishian, K Najafi ASME International Mechanical Engineering Congress and Exposition 46590 …, 2014 | | 2014 |
| HAIR Based Sensing and Actuation MM Sadeghi, BRL Peterson, K Najafi, ... | | 2012 |
| Vertically Aligned CNTs Embedded in Cr/TiO2 Membranes For Realization of Ion Sources Y Abdi, M Sadeghi, S Mohajerzadeh, J Koohsorkhi, B Hekmat-Shoar MRS Online Proceedings Library (OPL) 1018, 1018-EE14-34, 2007 | | 2007 |
| Fabrication of a two-dimensional photonic crystal using deep vertical etching of polyethylene terephtalate plastic Y Komijany, HS Pisheh, M Shahabadi, S Mohajerzadeh, M Sadeghi, ... 2005 Joint 30th International Conference on Infrared and Millimeter Waves …, 2005 | | 2005 |
Rebecca L (Becky) PetersonAssociate Professor of Electrical Engineering and Computer Science and Mat. Science & Eng.Verified email at umich.edu
