| MEMS reliability from a failure mechanisms perspective WM Van Spengen Microelectronics Reliability 43 (7), 1049-1060, 2003 | 414 | 2003 |
| A comprehensive model to predict the charging and reliability of capacitive RF MEMS switches WM Van Spengen, R Puers, R Mertens, I De Wolf Journal of Micromechanics and Microengineering 14 (4), 514, 2004 | 312 | 2004 |
| A physical model to predict stiction in MEMS WM Van Spengen, R Puers, I De Wolf Journal of micromechanics and microengineering 12 (5), 702, 2002 | 298 | 2002 |
| On the physics of stiction and its impact on the reliability of microstructures WM Van Spengen, R Puers, I De Wolf Journal of adhesion science and technology 17 (4), 563-582, 2003 | 130 | 2003 |
| Capacitive RF MEMS switch dielectric charging and reliability: a critical review with recommendations WM Van Spengen Journal of Micromechanics and Microengineering 22 (7), 074001, 2012 | 125 | 2012 |
| The investigation of microsystems using Raman spectroscopy I De Wolf, C Jian, WM van Spengen Optics and Lasers in Engineering 36 (2), 213-223, 2001 | 98 | 2001 |
| Experimental characterization of stiction due to charging in RF MEMS WM Van Spengen, R Puers, R Mertens, I De Wolf Digest. International Electron Devices Meeting,, 901-904, 2002 | 83 | 2002 |
| Techniques to study the reliability of metal RF MEMS capacitive switches. I De Wolf, WM van Spengen Microelectronics reliability 42 (9-11), 1789-1794, 2002 | 77 | 2002 |
| A low frequency electrical test set-up for the reliability assessment of capacitive RF MEMS switches WM van Spengen, R Puers, R Mertens, I De Wolf Journal of Micromechanics and Microengineering 13 (5), 604, 2003 | 64 | 2003 |
| Video‐rate scanning probe control challenges: Setting the stage for a microscopy revolution MJ Rost, GJC Van Baarle, AJ Katan, WM Van Spengen, P Schakel, ... Asian Journal of Control 11 (2), 110-129, 2009 | 63 | 2009 |
| The prediction of stiction failures in MEMS WM Van Spengen, R Puers, I De Wolf IEEE Transactions on Device and Materials reliability 3 (4), 167-172, 2003 | 62 | 2003 |
| Apparatus and method for determining the performance of micromachined or microelectromechanical devices (MEMS) WM Van Spengen US Patent 6,998,851, 2006 | 48 | 2006 |
| MEMS-based fast scanning probe microscopes FC Tabak, ECM Disseldorp, GH Wortel, AJ Katan, MBS Hesselberth, ... Ultramicroscopy 110 (6), 599-604, 2010 | 46 | 2010 |
| The Leiden MEMS tribometer: real time dynamic friction loop measurements with an on-chip tribometer WM Van Spengen, JWM Frenken Tribology letters 28, 149-156, 2007 | 45 | 2007 |
| MEMS-based high speed scanning probe microscopy ECM Disseldorp, FC Tabak, AJ Katan, MBS Hesselberth, TH Oosterkamp, ... Review of scientific instruments 81 (4), 2010 | 43 | 2010 |
| A sensitive electronic capacitance measurement system to measure the comb drive motion of surface micromachined MEMS devices WM van Spengen, TH Oosterkamp Journal of Micromechanics and Microengineering 17 (4), 828, 2007 | 41 | 2007 |
| In-plane displacement detection with picometer accuracy on a conventional microscope J Kokorian, F Buja, WM van Spengen Journal of Microelectromechanical Systems 24 (3), 618-625, 2014 | 35 | 2014 |
| Failure mechanisms in MEMS/NEMS devices WM van Spengen, R Modliński, R Puers, A Jourdain Springer handbook of nanotechnology, 1437-1457, 2017 | 32* | 2017 |
| The influence of the package environment on the functioning and reliability of RF-MEMS switches WM Van Spengen, P Czarnecki, R Puers, JTM Van Beek, I De Wolf 2005 IEEE International Reliability Physics Symposium, 2005. Proceedings …, 2005 | 29 | 2005 |
| High-resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopy I De Wolf, J Chen, M Rasras, WM van Spengen, V Simons Advanced Photonic Sensors and Applications 3897, 239-252, 1999 | 27 | 1999 |
Ingrid De Wolfimec AND KU LeuvenVerified email at imec.be
