| A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time S Xia, K Makinwa, S Nihtianov 2012 IEEE International Solid-State Circuits Conference, 198-200, 2012 | 115 | 2012 |
| Lithographic apparatus and device manufacturing method TPM Cadee, JJ Ottens, JJSM Mertens, FE De Jong, K Goorman, ... US Patent 7,304,715, 2007 | 104 | 2007 |
| Design strategies for eddy-current displacement sensor systems: Review and recommendations MR Nabavi, SN Nihtianov IEEE Sensors Journal 12 (12), 3346-3355, 2012 | 95 | 2012 |
| Lithographic apparatus and device manufacturing method having liquid evaporation control TPM Cadee, JHW Jacobs, N Ten Kate, ER Loopstra, ALHJ Vermeer, ... US Patent 7,804,575, 2010 | 94 | 2010 |
| Comparative study of silicon-based ultraviolet photodetectors L Shi, S Nihtianov IEEE Sensors Journal 12 (7), 2453-2459, 2012 | 77 | 2012 |
| Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography F Sarubbi, LK Nanver, TLM Scholtes, SN Nihtianov, F Scholze ESSDERC 2008-38th European Solid-State Device Research Conference, 278-281, 2008 | 61 | 2008 |
| Smart sensors and MEMS: Intelligent sensing devices and microsystems for industrial applications S Nihtianov, A Luque Woodhead Publishing, 2018 | 58 | 2018 |
| Eddy-current sensor interface for advanced industrial applications MR Nabavi, S Nihtianov IEEE Transactions on Industrial Electronics 58 (9), 4414-4423, 2010 | 51 | 2010 |
| Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector SN al. US Patent 8426831 B2, 2013 | 49* | 2013 |
| Capacitive-sensor interface with high accuracy and stability R Nojdelov, S Nihtianov IEEE Transactions on Instrumentation and Measurement 58 (5), 1633-1639, 2009 | 41 | 2009 |
| Sensor and lithographic apparatus S Nihtianov, HV Kok, MGD Wehrens US Patent 9,331,117, 2016 | 40 | 2016 |
| Measuring in the subnanometer range: Capacitive and eddy current nanodisplacement sensors S Nihtianov IEEE Industrial Electronics Magazine 8 (1), 6-15, 2014 | 40 | 2014 |
| An Energy-Efficient 3.7-nV/ Hz Bridge Readout IC With a Stable Bridge Offset Compensation Scheme H Jiang, S Nihtianov, KAA Makinwa IEEE Journal of Solid-State Circuits 54 (3), 856-864, 2018 | 39 | 2018 |
| A novel interface for eddy current displacement sensors MR Nabavi, S Nihtianov IEEE transactions on instrumentation and measurement 58 (5), 1623-1632, 2009 | 38 | 2009 |
| Parallel-field Hall microsensors: an overview CS Roumenin Sensors and Actuators A: Physical 30 (1-2), 77-87, 1992 | 37 | 1992 |
| Advances in capacitive, eddy current, and magnetic displacement sensors and corresponding interfaces B George, Z Tan, S Nihtianov IEEE Transactions on Industrial Electronics 64 (12), 9595-9607, 2017 | 35 | 2017 |
| An interface circuit for RC impedance sensors with a relaxation oscillator SN Nihtianov, GP Shterev, B Iliev, GCM Meijer IEEE Transactions on Instrumentation and Measurement 50 (6), 1563-1567, 2001 | 33 | 2001 |
| An interface for eddy-current displacement sensors with 15-bit resolution and 20 MHz excitation MR Nabavi, MAP Pertijs, S Nihtianov IEEE journal of solid-state circuits 48 (11), 2868-2881, 2013 | 32 | 2013 |
| High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application L Shi, F Sarubbi, SN Nihtianov, LK Nanver, TLM Scholtes, F Scholze 2009 35th Annual Conference of IEEE Industrial Electronics, 1877-1882, 2009 | 32 | 2009 |
| Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector S Nihtianov, AJ Van Der Sijs, B Moest, PWJM Kemper, MAM Haast, ... US Patent 8,138,485, 2012 | 30 | 2012 |
Lis NanverVerified email at utwente.nl
