Stoyan Nihtianov
Stoyan Nihtianov
Assoc. professor of Industrial Electronic Instrumentation, TU Delft
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Cited by
Cited by
A capacitance-to-digital converter for displacement sensing with 17b resolution and 20μs conversion time
S Xia, K Makinwa, S Nihtianov
2012 IEEE International Solid-State Circuits Conference, 198-200, 2012
Lithographic apparatus and device manufacturing method
TPM Cadee, JJ Ottens, JJSM Mertens, FE De Jong, K Goorman, ...
US Patent 7,304,715, 2007
Lithographic apparatus and device manufacturing method having liquid evaporation control
TPM Cadee, JHW Jacobs, N Ten Kate, ER Loopstra, ALHJ Vermeer, ...
US Patent 7,804,575, 2010
Design strategies for eddy-current displacement sensor systems: Review and recommendations
MR Nabavi, SN Nihtianov
IEEE Sensors Journal 12 (12), 3346-3355, 2012
Comparative study of silicon-based ultraviolet photodetectors
L Shi, S Nihtianov
IEEE Sensors Journal 12 (7), 2453-2459, 2012
Pure boron-doped photodiodes: a solution for radiation detection in EUV lithography
F Sarubbi, LK Nanver, TLM Scholtes, SN Nihtianov, F Scholze
ESSDERC 2008-38th European Solid-State Device Research Conference, 278-281, 2008
Smart sensors and MEMS: Intelligent sensing devices and microsystems for industrial applications
S Nihtianov, A Luque
Woodhead Publishing, 2018
Eddy-current sensor interface for advanced industrial applications
MR Nabavi, S Nihtianov
IEEE Transactions on Industrial Electronics 58 (9), 4414-4423, 2010
Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
SN al.
US Patent 8426831 B2, 2013
Capacitive-sensor interface with high accuracy and stability
R Nojdelov, S Nihtianov
IEEE Transactions on Instrumentation and Measurement 58 (5), 1633-1639, 2009
Measuring in the subnanometer range: Capacitive and eddy current nanodisplacement sensors
S Nihtianov
IEEE Industrial Electronics Magazine 8 (1), 6-15, 2014
A novel interface for eddy current displacement sensors
MR Nabavi, S Nihtianov
IEEE transactions on instrumentation and measurement 58 (5), 1623-1632, 2009
Sensor and lithographic apparatus
S Nihtianov, HV Kok, MGD Wehrens
US Patent 9,331,117, 2016
Parallel-field Hall microsensors: an overview
CS Roumenin
Sensors and Actuators A: Physical 30 (1-2), 77-87, 1992
An Energy-Efficient 3.7-nV/ Hz Bridge Readout IC With a Stable Bridge Offset Compensation Scheme
H Jiang, S Nihtianov, KAA Makinwa
IEEE Journal of Solid-State Circuits 54 (3), 856-864, 2018
An interface circuit for RC impedance sensors with a relaxation oscillator
SN Nihtianov, GP Shterev, B Iliev, GCM Meijer
IEEE Transactions on Instrumentation and Measurement 50 (6), 1563-1567, 2001
High performance silicon-based extreme ultraviolet (EUV) radiation detector for industrial application
L Shi, F Sarubbi, SN Nihtianov, LK Nanver, TLM Scholtes, F Scholze
2009 35th Annual Conference of IEEE Industrial Electronics, 1877-1882, 2009
An interface for eddy-current displacement sensors with 15-bit resolution and 20 MHz excitation
MR Nabavi, MAP Pertijs, S Nihtianov
IEEE journal of solid-state circuits 48 (11), 2868-2881, 2013
Power-efficient high-speed and high-resolution capacitive-sensor interface for subnanometer displacement measurements
S Xia, S Nihtianov
IEEE Transactions on Instrumentation and Measurement 61 (5), 1315-1322, 2012
Advances in capacitive, eddy current, and magnetic displacement sensors and corresponding interfaces
B George, Z Tan, S Nihtianov
IEEE Transactions on Industrial Electronics 64 (12), 9595-9607, 2017
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