A single-mask thermal displacement sensor in MEMS B Krijnen, RP Hogervorst, JW Van Dijk, JBC Engelen, LA Woldering, ... Journal of Micromechanics and Microengineering 21 (7), 074007, 2011 | 41 | 2011 |
Flexures for large stroke electrostatic actuation in MEMS B Krijnen, DM Brouwer Journal of micromechanics and microengineering 24 (1), 015006, 2013 | 33 | 2013 |
Long-range elastic guidance mechanisms for electrostatic comb-drive actuators DM Brouwer, A Otten, JBC Engelen, B Krijnen, H Soemers EUSPEN 1, 47-50, 2010 | 33 | 2010 |
A large-stroke 3DOF stage with integrated feedback in MEMS B Krijnen, KR Swinkels, DM Brouwer, L Abelmann, JL Herder Journal of Microelectromechanical Systems 24 (6), 1720-1729, 2015 | 6 | 2015 |
Position control of a MEMS stage with integrated sensor B Krijnen, DM Brouwer 11th EUSPEN International Conference 2011, 105-108, 2011 | 5 | 2011 |
A single-mask thermal displacement sensor in MEMS RP Hogervorst, B Krijnen, DM Brouwer, JBC Engelen, U Staufer EUSPEN, 2010 | 5 | 2010 |
Vacuum behavior and control of a MEMS stage with integrated thermal displacement sensor B Krijnen, DM Brouwer, L Abelmann, JL Herder Sensors and Actuators A: Physical 234, 321-330, 2015 | 4 | 2015 |
Deflection of an eccentric tooth of a comb drive in an electrostatic field JP Meijaard, B Krijnen, DM Brouwer International Design Engineering Technical Conferences and Computers and …, 2013 | 3 | 2013 |
Vacuum performance and control of a MEMS stage with integrated thermal position sensor B Krijnen, D Brouwer, L Abelmann, J Herder Proc. 14th Int. Conf. EUSPEN 2, 435-438, 2014 | 2 | 2014 |
Deflection and Pull-In of a Misaligned Comb Drive Finger in an Electrostatic Field JP Meijaard, B Krijnen, DM Brouwer Journal of Microelectromechanical Systems 23 (4), 927-933, 2014 | 2 | 2014 |
A large-stroke planar MEMS-based stage with integrated feedback B Krijnen Universiteit Twente, 2014 | 1 | 2014 |
Design and optimization of a 3-DOF planar MEMS Stage with integrated thermal position sensors B Krijnen, KR Swinkels, DM Brouwer, JL Herder 13th EUSPEN International Conference 2013, 322-325, 2013 | 1 | 2013 |
Wavefront correction at Angstom length scales B Wylie-Van Eerd, M Bayraktar, AR Chopra, B Krijnen, AJHM Rijnders, ... Physics@ FOM Veldhoven 2016, 2016 | | 2016 |
Erratum to" A Large-Stroke 3DOF Stage With Integrated Feedback in MEMS" B Krijnen, KR Swinkels, DM Brouwer, L Abelmann, JL Herder Journal of microelectromechanical systems 24 (5), 1659, 2015 | | 2015 |
Accurate small-scale manipulation B Krijnen, K Swinkels, DM Brouwer, L Abelmann, JL Herder Mikroniek: vakblad voor precisie-technologie 55 (5), 2015 | | 2015 |
A closed-loop large range of motion positioning system in MEMS B Krijnen, DM Brouwer 1st DSPE Conference on Precision Mechatronics 2012, 73-75, 2012 | | 2012 |
A Thermal displacement sensor in MEMS [Towards accurate small-scale manipulation] B Krijnen, R Hogervorst, JW van Dijk, J Engelen, L Woldering, D Brouwer, ... Mikroniek 51 (4), 5-11, 2011 | | 2011 |
ACCURATE SMALL-SCALE B KRIJNEN, K SWINKELS, D BROUWER, L ABELMANN, J HERDER | | |
1663 The Piezoresistive Effect of SiC for MEMS Sensors at High Temperatures: A Review HP Phan, DV Dao, K Nakamura, S Dimitrijev, NT Nguyen, YJ Yang, ... | | |