Follow
Duygu Akbulut
Duygu Akbulut
Verified email at asml.com
Title
Cited by
Cited by
Year
Scattering lens resolves sub-100 nm structures with visible light
EG van Putten, D Akbulut, J Bertolotti, WL Vos, A Lagendijk, AP Mosk
Physical review letters 106 (19), 193905, 2011
3572011
Focusing light through random photonic media by binary amplitude modulation
D Akbulut, TJ Huisman, EG van Putten, WL Vos, AP Mosk
Optics express 19 (5), 4017-4029, 2011
2342011
Ultralow threshold laser action from toroidal polymer microcavity
A Tulek, D Akbulut, M Bayindir
Applied Physics Letters 94 (20), 2009
572009
Optical transmission matrix as a probe of the photonic strength
D Akbulut, T Strudley, J Bertolotti, EPAM Bakkers, A Lagendijk, ...
Physical Review A 94 (4), 043817, 2016
212016
Method and apparatus for inspection and metrology
PD Van Voorst, D Akbulut, K Van Berkel, JJM Van De Wijdeven, F Zijp
US Patent 9,811,001, 2017
132017
Observation of intensity statistics of light transmitted through 3D random media
T Strudley, D Akbulut, WL Vos, A Lagendijk, AP Mosk, OL Muskens
Optics letters 39 (21), 6347-6350, 2014
132014
Measurements of strong correlations in the transport of light through strongly scattering materials
D Akbulut
122013
Method and apparatus for inspection and metrology
F Zijp, ST VAN DER POST, K Fanhe, D Akbulut
US Patent 10,126,659, 2018
62018
Method and apparatus for inspection and metrology
F Zijp, D Akbulut, PD Van Voorst, JJM Van De Wijdeven, K Van Berkel
US Patent 10,185,224, 2019
52019
Position sensor, lithographic apparatus and method for manufacturing devices
SR Huisman, SGJ Mathijssen, SA Goorden, D Akbulut, P Alessandro
US Patent 10,527,959, 2020
42020
Metrology apparatus, lithographic system, and method of measuring a structure
J Ravensbergen, D Akbulut, N Pandey, L Jin
US Patent 10,444,640, 2019
42019
Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method
SR Huisman, P Alessandro, D Akbulut, SA Goorden, AJ Den Boef
US Patent 10,317,808, 2019
42019
Measurements on the optical transmission matrices of strongly scattering nanowire layers
D Akbulut, T Strudley, J Bertolotti, T Zehender, EPAM Bakkers, ...
International Quantum Electronics Conference, IH_P_19, 2013
42013
Generation of new frequencies in toroid microcavities
D Akbulut, A Tulek, M Bayindir
2008 10th Anniversary International Conference on Transparent Optical …, 2008
32008
Metrology sensor, lithographic apparatus and method for manufacturing devices
SA Goorden, N Pandey, D Akbulut, P Alessandro, SR Huisman
US Patent 11,086,240, 2021
22021
Method and apparatus for inspection and metrology
K Van Berkel, D Akbulut, JJM Van De Wijdeven, F Zijp
US Patent 9,927,722, 2018
22018
Scattering optics resolve nanostructure
J Bertolotti, EG van Putten, D Akbulut, WL Vos, A Lagendijk, AP Mosk
Nanoengineering: Fabrication, Properties, Optics, and Devices VIII 8102, 22-32, 2011
22011
Lasing action and supercontinuum generation in nano-and micro-structures
D Akbulut
PQDT-Global, 2009
22009
Apparatus and methods for determining the position of a target structure on a substrate
N Pandey, D Akbulut, P Alessandro, SA Goorden
US Patent 11,927,891, 2024
12024
Method and apparatus for deriving corrections, method and apparatus for determining a property of a structure, device manufacturing method
N Kumar, AJH Schellekens, ST VAN DER POST, F Zijp, WMJM Coene, ...
US Patent 11,243,470, 2022
12022
The system can't perform the operation now. Try again later.
Articles 1–20