Follow
M.J. de Boer (Meint)
M.J. de Boer (Meint)
Mesa+ Institute for Nanotechnology - University of Twente
Verified email at utwente.nl - Homepage
Title
Cited by
Cited by
Year
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
H Jansen, M de Boer, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 5 (2), 115, 1995
7381995
A survey on the reactive ion etching of silicon in microtechnology
H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman
Journal of micromechanics and microengineering 6 (1), 14, 1996
6671996
Silicon micromachined hollow microneedles for transdermal liquid transport
HJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ...
Journal of Microelectromechanical systems 12 (6), 855-862, 2003
5772003
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as …
HV Jansen, MJ De Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek
Journal of micromechanics and microengineering 19 (3), 033001, 2009
3602009
Micromachining of buried micro channels in silicon
MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of Microelectromechanical systems 9 (1), 94-103, 2000
3142000
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ...
Journal of microelectromechanical systems 11 (4), 385-401, 2002
3132002
Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures
R Legtenberg, H Jansen, M de Boer, M Elwenspoek
Journal of the electrochemical society 142 (6), 2020, 1995
2701995
Microneedle structure and production method therefor
Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers
US Patent 6,533,949, 2003
2632003
BSM 7: RIE lag in high aspect ratio trench etching of silicon
H Jansen, M de Boer, R Wiegerink, N Tas, E Smulders, C Neagu, ...
Microelectronic Engineering 35 (1-4), 45-50, 1997
1881997
The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches
H Jansen, M de Boer, J Burger, R Legtenberg, M Elwenspoek
Microelectronic engineering 27 (1-4), 475-480, 1995
1601995
Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk …
ET Den Braber, HV Jansen, MJ de Boer, HJE Croes, M Elwenspoek, ...
Journal of biomedical materials research 40 (3), 425-433, 1998
1171998
The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source
H Jansen, M De Boer, H Wensink, B Kloeck, M Elwenspoek
Microelectronics Journal 32 (9), 769-777, 2001
1072001
Micromachined fountain pen for atomic force microscope-based nanopatterning
S Deladi, NR Tas, JW Berenschot, GJM Krijnen, MJ de Boer, JH De Boer, ...
Applied physics letters 85 (22), 5361-5363, 2004
1062004
Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels
M Dijkstra, MJ de Boer, JW Berenschot, TSJ Lammerink, RJ Wiegerink, ...
Sensors and Actuators A: Physical 143 (1), 1-6, 2008
1052008
Carrier transport in mesoscopic silicon-coupled superconducting junctions
WM Van Huffelen, TM Klapwijk, DR Heslinga, MJ De Boer, ...
Physical Review B 47 (9), 5170, 1993
1001993
Capillary force lithography: fabrication of functional polymer templates as versatile tools for nanolithography
CM Bruinink, M Péter, PA Maury, M De Boer, L Kuipers, J Huskens, ...
Advanced Functional Materials 16 (12), 1555-1565, 2006
992006
Mining for osteogenic surface topographies: In silico design to in vivo osseo-integration
FFB Hulshof, B Papenburg, A Vasilevich, M Hulsman, Y Zhao, M Levers, ...
Biomaterials 137, 49-60, 2017
752017
Microneedle structure and production method therefor
Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers
US Patent 7,648,484, 2010
752010
Advancements in technology and design of biomimetic flow-sensor arrays
CM Bruinink, RK Jaganatharaja, MJ de Boer, E Berenschot, ML Kolster, ...
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009
722009
Polymer microneedles
Y Yeshurun, M Hefetz, E Berenschot, M De Boer, DM Altpeter, G Boom
US Patent 6,924,087, 2005
712005
The system can't perform the operation now. Try again later.
Articles 1–20