| The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control H Jansen, M de Boer, R Legtenberg, M Elwenspoek Journal of Micromechanics and Microengineering 5 (2), 115, 1995 | 755 | 1995 |
| A survey on the reactive ion etching of silicon in microtechnology H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman Journal of micromechanics and microengineering 6 (1), 14, 1996 | 694 | 1996 |
| Silicon micromachined hollow microneedles for transdermal liquid transport HJGE Gardeniers, R Luttge, EJW Berenschot, MJ De Boer, SY Yeshurun, ... Journal of Microelectromechanical systems 12 (6), 855-862, 2003 | 598 | 2003 |
| Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as … HV Jansen, MJ De Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek Journal of micromechanics and microengineering 19 (3), 033001, 2009 | 372 | 2009 |
| Micromachining of buried micro channels in silicon MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ... Journal of Microelectromechanical systems 9 (1), 94-103, 2000 | 323 | 2000 |
| Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ... Journal of microelectromechanical systems 11 (4), 385-401, 2002 | 322 | 2002 |
| Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures R Legtenberg, H Jansen, M de Boer, M Elwenspoek Journal of the electrochemical society 142 (6), 2020, 1995 | 279 | 1995 |
| Microneedle structure and production method therefor Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers US Patent 6,533,949, 2003 | 265 | 2003 |
| BSM 7: RIE lag in high aspect ratio trench etching of silicon H Jansen, M de Boer, R Wiegerink, N Tas, E Smulders, C Neagu, ... Microelectronic Engineering 35 (1-4), 45-50, 1997 | 193 | 1997 |
| The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches H Jansen, M de Boer, J Burger, R Legtenberg, M Elwenspoek Microelectronic engineering 27 (1-4), 475-480, 1995 | 168 | 1995 |
| Scanning electron microscopic, transmission electron microscopic, and confocal laser scanning microscopic observation of fibroblasts cultured on microgrooved surfaces of bulk … ET Den Braber, HV Jansen, MJ de Boer, HJE Croes, M Elwenspoek, ... Journal of biomedical materials research 40 (3), 425-433, 1998 | 117 | 1998 |
| The black silicon method. VIII. A study of the performance of etching silicon using SF6/O2-based chemistry with cryogenical wafer cooling and a high density ICP source H Jansen, M De Boer, H Wensink, B Kloeck, M Elwenspoek Microelectronics Journal 32 (9), 769-777, 2001 | 109 | 2001 |
| Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels M Dijkstra, MJ de Boer, JW Berenschot, TSJ Lammerink, RJ Wiegerink, ... Sensors and Actuators A: Physical 143 (1), 1-6, 2008 | 106 | 2008 |
| Micromachined fountain pen for atomic force microscope-based nanopatterning S Deladi, NR Tas, JW Berenschot, GJM Krijnen, MJ de Boer, JH De Boer, ... Applied physics letters 85 (22), 5361-5363, 2004 | 106 | 2004 |
| Carrier transport in mesoscopic silicon-coupled superconducting junctions WM Van Huffelen, TM Klapwijk, DR Heslinga, MJ De Boer, ... Physical Review B 47 (9), 5170, 1993 | 102 | 1993 |
| Capillary force lithography: fabrication of functional polymer templates as versatile tools for nanolithography CM Bruinink, M Péter, PA Maury, M De Boer, L Kuipers, J Huskens, ... Advanced Functional Materials 16 (12), 1555-1565, 2006 | 99 | 2006 |
| Mining for osteogenic surface topographies: In silico design to in vivo osseo-integration FFB Hulshof, B Papenburg, A Vasilevich, M Hulsman, Y Zhao, M Levers, ... Biomaterials 137, 49-60, 2017 | 78 | 2017 |
| Microneedle structure and production method therefor Y Yeshurun, M Hefetz, M De Boer, JW Berenschot, JGE Gardeniers US Patent 7,648,484, 2010 | 76 | 2010 |
| Advancements in technology and design of biomimetic flow-sensor arrays CM Bruinink, RK Jaganatharaja, MJ de Boer, E Berenschot, ML Kolster, ... 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems …, 2009 | 73 | 2009 |
| Polymer microneedles Y Yeshurun, M Hefetz, E Berenschot, M De Boer, DM Altpeter, G Boom US Patent 6,924,087, 2005 | 73 | 2005 |
BerenschotMESA+ Institute for Nanotechnology, University of TwenteVerified email at utwente.nl
