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Aamod Shanker
Aamod Shanker
University of Rochester, NY
Geverifieerd e-mailadres voor berkeley.edu - Homepage
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Low-noise phase imaging by hybrid uniform and structured illumination transport of intensity equation
Y Zhu, A Shanker, L Tian, L Waller, G Barbastathis
Optics express 22 (22), 26696-26711, 2014
522014
Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks
A Shanker, L Tian, M Sczyrba, B Connolly, A Neureuther, L Waller
Applied optics 53 (34), J1-J6, 2014
332014
Aberration recovery by imaging a weak diffuser
G Gunjala, S Sherwin, A Shanker, L Waller
Optics Express 26 (16), 21054-21068, 2018
172018
Critical assessment of the transport of intensity equation as a phase recovery technique in optical lithography
A Shanker, M Sczyrba, B Connolly, F Kalk, A Neureuther, L Waller
Optical Microlithography XXVII 9052, 401-410, 2014
152014
Absorber topography dependence of phase edge effects
A Shanker, M Sczyrba, B Connolly, L Waller, A Neureuther
Photomask Technology 2015 9635, 104-113, 2015
92015
Optical transfer function characterization using a weak diffuser
G Gunjala, A Shanker, V Jaedicke, N Antipa, L Waller
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and …, 2016
82016
Extreme ultraviolet microscope characterization using photomask surface roughness
G Gunjala, A Wojdyla, S Sherwin, A Shanker, MP Benk, KA Goldberg, ...
Scientific reports 10 (1), 11673, 2020
62020
Defocus-based quantitative phase imaging by coded illumination
A Shanker, L Tian, L Waller
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and …, 2014
62014
Characterizing the dependence of thick-mask edge effects on illumination angle using AIMS images
A Shanker, M Sczyrba, F Lange, B Connolly, AR Neureuther, L Waller
Optical Microlithography XXVIII 9426, 178-185, 2015
52015
Defocus based phase imaging for quantifying electromagnetic edge effects in photomasks
A Shanker, L Waller, AR Neureuther
Master’s thesis (University of California, 2014), 2014
52014
Analysis of edge effects in attenuating phase-shift masks using quantitative phase imaging
A Shanker, M Sczyrba, B Connolly, A Neureuther, L Waller
Photomask Technology 2013 8880, 352-363, 2013
52013
Off-axis aberration estimation in an EUV microscope using natural speckle
A Shanker, A Wojdyla, G Gunjala, J Dong, M Benk, A Neureuther, ...
Imaging Systems and Applications, ITh1F. 2, 2016
42016
Recovering curl using an iterative solver for the transport of intensity equation
A Shanker, L Tian, M Sczyrba, B Connolly, A Neureuther, L Waller
Imaging Systems and Applications, ITh2A. 5, 2015
22015
Quantitative Phase Imaging with a Metalens
A Shanker, J Froech, S Mukherjee, M Zhelyeznyakov, E Seibel, ...
arXiv preprint arXiv:2309.11348, 2023
12023
Partially Coherent Double-Phase Holography in Visible Wavelength Using Meta-Optics
S Mukherjee, QAA Tanguy, JE Fröch, A Shanker, KF Böhringer, ...
ACS Photonics 10 (5), 1376-1381, 2023
12023
Speckle metrology for extreme ultra-violet lithography
A Shanker, L Waller, G Gunjala, A Wojdyla, D Voronov, P Naulleau
Extreme Ultraviolet (EUV) Lithography IX 10583, 206-214, 2018
12018
Differential methods for phase imaging in optical lithography
A Shanker
University of California, Berkeley, 2018
12018
Universal principles of intelligent system design
K Popov, A Shanker, D Bhowmik
Cosmos and History: The Journal of Natural and Social Philosophy 14 (1), 113-123, 2018
12018
EUV mask roughness can recover litho-tool aberrations (Conference Presentation)
A Shanker, L Waller, A Wojdyla, MP Benk, KA Goldberg, PP Naulleau
International Conference on Extreme Ultraviolet Lithography 2017 10450, 104500S, 2017
12017
X-ray phase imaging and computed tomography with sandpaper analyzer
Y Hu, M Chen, LH Yeh, D Parkinson, A Shanker, A MacDowell, L Waller
Computational Optical Sensing and Imaging, CM3E. 6, 2015
12015
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Artikelen 1–20