Aamod Shanker
Aamod Shanker
Geverifieerd e-mailadres voor berkeley.edu
Titel
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Low-noise phase imaging by hybrid uniform and structured illumination transport of intensity equation
Y Zhu, A Shanker, L Tian, L Waller, G Barbastathis
Optics express 22 (22), 26696-26711, 2014
382014
Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks
A Shanker, L Tian, M Sczyrba, B Connolly, A Neureuther, L Waller
Applied optics 53 (34), J1-J6, 2014
312014
Critical assessment of the transport of intensity equation as a phase recovery technique in optical lithography
A Shanker, M Sczyrba, B Connolly, F Kalk, A Neureuther, L Waller
Optical Microlithography XXVII 9052, 90521D, 2014
132014
Absorber topography dependence of phase edge effects
A Shanker, M Sczyrba, B Connolly, L Waller, A Neureuther
Photomask Technology 2015 9635, 96350G, 2015
62015
Defocus-based quantitative phase imaging by coded illumination
A Shanker, L Tian, L Waller
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and …, 2014
62014
Aberration recovery by imaging a weak diffuser
G Gunjala, S Sherwin, A Shanker, L Waller
Optics express 26 (16), 21054-21068, 2018
52018
Characterizing the dependence of thick-mask edge effects on illumination angle using AIMS images
A Shanker, M Sczyrba, F Lange, B Connolly, AR Neureuther, L Waller
Optical Microlithography XXVIII 9426, 94260O, 2015
52015
Defocus based phase imaging for quantifying electromagnetic edge effects in photomasks
A Shanker, L Waller, AR Neureuther
Master’s thesis, University of California, Berkeley (May 2014), 2014
52014
Optical transfer function characterization using a weak diffuser
G Gunjala, A Shanker, V Jaedicke, N Antipa, L Waller
Three-Dimensional and Multidimensional Microscopy: Image Acquisition and …, 2016
42016
Analysis of edge effects in attenuating phase-shift masks using quantitative phase imaging
A Shanker, M Sczyrba, B Connolly, A Neureuther, L Waller
Photomask Technology 2013 8880, 88802A, 2013
32013
Off-axis aberration estimation in an EUV microscope using natural speckle
A Shanker, A Wojdyla, G Gunjala, J Dong, M Benk, A Neureuther, ...
Imaging Systems and Applications, ITh1F. 2, 2016
22016
Recovering curl using an iterative solver for the transport of intensity equation
A Shanker, L Tian, M Sczyrba, B Connolly, A Neureuther, L Waller
Imaging Systems and Applications, ITh2A. 5, 2015
22015
Differential methods in phase imaging for optical lithography
A Shanker, L Waller, AR Neureuther, P Naulleau
PhD thesis, University of California, Berkeley (May 2018), 2018
12018
EUV mask roughness can recover litho-tool aberrations (Conference Presentation)
A Shanker, L Waller, A Wojdyla, MP Benk, KA Goldberg, PP Naulleau
International Conference on Extreme Ultraviolet Lithography 2017 10450, 104500S, 2017
12017
X-ray phase imaging and computed tomography with sandpaper analyzer
Y Hu, M Chen, LH Yeh, D Parkinson, A Shanker, A MacDowell, L Waller
Computational Optical Sensing and Imaging, CM3E. 6, 2015
12015
Universal Principles of Intelligent System Design
K Popov, A Shanker, D Bhowmik
Cosmos and History: The Journal of Natural and Social Philosophy 14 (1), 113-122, 2018
2018
Turbulent flow in coherent speckle
A Shanker, G Nivarti, L Waller, C Bibiane-Schönlieb
Mathematics in Imaging, MW3D. 6, 2018
2018
Field-varying aberration recovery in EUV microscopy using mask roughness
G Gunjala, A Wojdyla, A Shanker, S Sherwin, MP Benk, KA Goldberg, ...
Computational Optical Sensing and Imaging, CW2E. 2, 2018
2018
Speckle metrology for extreme ultra-violet lithography
A Shanker, L Waller, G Gunjala, A Wojdyla, D Voronov, P Naulleau
Extreme Ultraviolet (EUV) Lithography IX 10583, 105830T, 2018
2018
Linear scattering theory in phase space (Conference Presentation)
A Shanker, L Waller
Image Sensing Technologies: Materials, Devices, Systems, and Applications V …, 2018
2018
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Artikelen 1–20