| EUV sources using Xe and Sn discharge plasmas VM Borisov, AV Eltsov, AS Ivanov, YB Kiryukhin, OB Khristoforov, ... Journal of Physics D: Applied Physics 37 (23), 3254, 2004 | 94 | 2004 |
| The study of silicon films obtained by sequential lateral solidification by means of a 3-kHz excimer laser with a sheetlike beam AB Limanov, VA Chubarenko, VM Borisov, AY Vinokhodov, AI Demin, ... Russian Microelectronics 28 (1), 25-33, 1999 | 52 | 1999 |
| Development of linear sequential lateral solidification technique to fabricate quasi-single-crystal super-thin si films for high-performance thin film transistor devices AB Limanov, VM Borisov, AY Vinokhodov, AI Demin, AI El’tsov, ... Perspectives, Science and Technologies for Novel Silicon on Insulator …, 2000 | 46 | 2000 |
| Method of producing short-wave radiation from a gas-discharge plasma and device for implementing it VM Borisov, OB Khristoforov US Patent 6,414,438, 2002 | 30 | 2002 |
| High-power EUV sources for lithography: a comparison of laser-produced plasma and gas-discharge-produced plasma U Stamm, I Ahmad, VM Borisov, F Flohrer, K Gaebel, S Götze, AS Ivanov, ... Emerging Lithographic Technologies VI 4688, 122-133, 2002 | 30 | 2002 |
| High-power EUV sources for lithography: a comparison of laser-produced plasma and gas-discharge-produced plasma U Stamm, I Ahmad, VM Borisov, F Flohrer, K Gaebel, S Götze, AS Ivanov, ... Emerging Lithographic Technologies VI 4688, 122-133, 2002 | 30 | 2002 |
| Compact Z-pinch EUV source for photolithography G Schriever, M Rahe, U Stamm, D Basting, OB Khristoforov, ... Emerging Lithographic Technologies V 4343, 615-620, 2001 | 27 | 2001 |
| Development of high-power EUV sources for lithography VM Borisov, I Ahmad, S Goetze, AS Ivanov, OB Khristoforov, ... Emerging Lithographic Technologies VI 4688, 626-633, 2002 | 26 | 2002 |
| Development of high-power EUV sources for lithography VM Borisov, I Ahmad, S Goetze, AS Ivanov, OB Khristoforov, ... Emerging Lithographic Technologies VI 4688, 626-633, 2002 | 26 | 2002 |
| Experimental investigation of the characteristics of a planar surface discharge VM Borisov, AM Davidovskiĭ, OB Khristoforov Soviet Journal of Quantum Electronics 12 (11), 1403, 1982 | 25 | 1982 |
| High power EUV sources based on gas discharge plasmas and laser produced plasmas G Schriever, U Stamm, K Gäbel, M Darscht, V Borisov, O Khristoforov, ... Microelectronic engineering 61, 83-88, 2002 | 22 | 2002 |
| Powerful highly efficient KrF lamps excited by surface and barrier discharges VM Borisov, VA Vodchits, AV El'tsov, OB Khristoforov Quantum electronics 28 (4), 297, 1998 | 22 | 1998 |
| Wide-aperture electric-discharge XeCl laser with ultraviolet preionization and 20-J output energy VY Baranov, VM Borisov, DN Molchanov, VP Novikov, OB Khristoforov Soviet Journal of Quantum Electronics 17 (8), 978, 1987 | 22 | 1987 |
| Kilowatt-range high-repetition-rate excimer lasers VM Borisov, OB Khristoforov, YB Kirykhin, SG Kuznetsov, YY Stepanov, ... Excimer Lasers and Applications III 1503, 40-47, 1991 | 20 | 1991 |
| Use of a discharge over a dielectric surface for preionization in excimer lasers VY Baranov, VM Borisov, AM Davidovskiĭ, OB Khristoforov Soviet Journal of Quantum Electronics 11 (1), 42, 1981 | 20 | 1981 |
| Use of a discharge over a dielectric surface for preionization in excimer lasers VY Baranov, VM Borisov, AM Davidovskiĭ, OB Khristoforov Soviet Journal of Quantum Electronics 11 (1), 42, 1981 | 20 | 1981 |
| Excimer electric-discharge laser with plasma electrodes VY Baranov, VM Borisov, OB Khristoforov Soviet Journal of Quantum Electronics 11 (1), 93, 1981 | 19 | 1981 |
| High-power, highly stable KrF laser with a pulse repetition rate VM Borisov, AV El'tsov, OB Khristoforov Quantum Electronics 45 (8), 691, 2015 | 16 | 2015 |
| High-power gas-discharge EUV source VM Borisov, AY Vinokhodov, AS Ivanov, YB Kiryukhin, SV Mironov, ... Plasma Physics Reports 28, 877-881, 2002 | 13 | 2002 |
| High-power EUV (13.5 nm) light source VM Borisov, GN Borisova, AY Vinokhodov, SV Zakharov, AS Ivanov, ... Quantum Electronics 40 (8), 720, 2010 | 12 | 2010 |
Konstantin KoshelevInstitute for Spectroscopy RASGeverifieerd e-mailadres voor isan.troitsk.ru
Konstantin KoshelevInstitute for Spectroscopy RASGeverifieerd e-mailadres voor isan.troitsk.ru