| Physical processes in EUV sources for microlithography VY Banine, KN Koshelev, G Swinkels Journal of Physics D: Applied Physics 44 (25), 253001, 2011 | 243 | 2011 |
| Plasma points and radiative collapse in vacuum sparks KN Koshelev, NR Pereira Journal of applied physics 69 (10), R21-R44, 1991 | 235 | 1991 |
| Formation and evolution of the micropinch region in a vacuum spark VV Vikhrev, VV Ivanov, KN Koshelev Fizika Plazmy 8, 1211-1219, 1982 | 202* | 1982 |
| Gain in the far vacuum ultraviolet region due to transitions in multiply charged ions AN Zherikhin, KN Koshelev, VS Letokhov Soviet Journal of Quantum Electronics 6 (1), 82, 1976 | 131 | 1976 |
| Lasing mechanism in a capillary discharge HJ Kunze, KN Koshelev, C Steden, D Uskov, HT Wieschebrink Physics Letters A 193 (2), 183-187, 1994 | 80 | 1994 |
| Radiation source for use in lithographic projection apparatus F Bijkerk, H Fiedorowicz, CC De Bruijn, A Bartnik, KN Koshelev, ... US Patent 6,452,194, 2002 | 65 | 2002 |
| The formation of the micropinch structure in plasma focus by the addition of heavy impurities KN Koshelev, VI Krauz, NG Reshetniak, RG Salukvadze, YV Sidelnikov, ... Journal of Physics D: Applied Physics 21 (12), 1827, 1988 | 63 | 1988 |
| Research and development in short-wave radiation sources for new-generation lithography KN Koshelev, VE Banine, NN Salashchenko Uspekhi Fizicheskikh Nauk 177 (7), 777-780, 2007 | 62* | 2007 |
| Lithographic projection apparatus, device manufacturing method, and device manufactured thereby NB Koster, BM Mertens, MHA Leenders, VV Ivanov, KN Koshelev, ... US Patent 6,614,505, 2003 | 59 | 2003 |
| Pinch modes produced in the SPEED2 plasma focus W Kies, G Decker, U Berntien, YV Sidelnikov, DA Glushkov, KN Koshelev, ... Plasma Sources Science and Technology 9 (3), 279, 2000 | 51 | 2000 |
| Expansion and fragmentation of a liquid-metal droplet by a short laser pulse SY Grigoryev, BV Lakatosh, MS Krivokorytov, VV Zhakhovsky, ... Physical Review Applied 10 (6), 064009, 2018 | 48 | 2018 |
| Population inversion of Alxi in a laser plasma EY Kononov, KN Koshelev, YA Levykin, YV Sidel'Nikov, SS Churilov Soviet Journal of Quantum Electronics 6 (3), 308, 1976 | 45* | 1976 |
| Fragmentation dynamics of liquid–metal droplets under ultra-short laser pulses MM Basko, MS Krivokorytov, AY Vinokhodov, YV Sidelnikov, VM Krivtsun, ... Laser Physics Letters 14 (3), 036001, 2017 | 43 | 2017 |
| Removal of amorphous C and Sn on Mo: Si multilayer mirror surface in Hydrogen plasma and afterglow OV Braginsky, AS Kovalev, DV Lopaev, EM Malykhin, TV Rakhimova, ... Journal of Applied Physics 111 (9), 2012 | 42 | 2012 |
| Two regimes of micropinching in a low-inductance vacuum spark PS Antsiferov, KN Koshelev, AE Kramida, AM Panin Journal of Physics D: Applied Physics 22 (8), 1073, 1989 | 42 | 1989 |
| Characterization of a vacuum-arc discharge in tin vapor using time-resolved plasma imaging and extreme ultraviolet spectrometry ER Kieft, J Van Der Mullen, GMW Kroesen, V Banine, KN Koshelev Physical Review E 71 (2), 026409, 2005 | 41 | 2005 |
| Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen RM Van Der Horst, J Beckers, EA Osorio, DI Astakhov, WJ Goedheer, ... Journal of Physics D: Applied Physics 49 (14), 145203, 2016 | 40 | 2016 |
| Cavitation and spallation in liquid metal droplets produced by subpicosecond pulsed laser radiation MS Krivokorytov, AY Vinokhodov, YV Sidelnikov, VM Krivtsun, ... Physical Review E 95 (3), 031101, 2017 | 38 | 2017 |
| Micropinch actuation in the SPEED 2 plasma focus G Decker, W Kies, R Nadolny, P Röwekamp, F Schmitz, G Ziethen, ... Plasma Sources Science and Technology 5 (1), 112, 1996 | 38 | 1996 |
| Identification of the solar spectra of multicharged iron ions on the basis of laboratory measurements EY Kononov, KN Koshelev, LI Podobedova, SV Chekalin, SS Churilov Journal of Physics B: Atomic and Molecular Physics 9 (4), 565, 1976 | 35 | 1976 |
Alexander VinokhodovEUV Labs, LtdGeverifieerd e-mailadres voor rnd-isan.ru
