Integrated pressure sensing using capacitive Coriolis mass flow sensors D Alveringh, RJ Wiegerink, JC Lötters Journal of microelectromechanical systems 26 (3), 653-661, 2017 | 24 | 2017 |
Resistive pressure sensors integrated with a coriolis mass flow sensor D Alveringh, TVP Schut, RJ Wiegerink, W Sparreboom, JC Lötters 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 21 | 2017 |
SU–8 micro coriolis mass flow sensor R Monge, J Groenesteijn, D Alveringh, RJ Wiegerink, J Lötters, ... Sensors and actuators B: Chemical 241, 744-749, 2017 | 20 | 2017 |
Design, fabrication, and characterization of a micro Coriolis mass flow sensor driven by PZT thin film actuators Y Zeng, J Groenesteijn, D Alveringh, RJ Wiegerink, JC Lötters Journal of microelectromechanical systems 30 (6), 885-896, 2021 | 13 | 2021 |
Experimental analysis of thermomechanical noise in micro Coriolis mass flow sensors D Alveringh, RJ Wiegerink, J Groenesteijn, RGP Sanders, JC Lötters Sensors and Actuators A: Physical 271, 212-216, 2018 | 13 | 2018 |
Fully integrated mass flow, pressure, density and viscosity sensor for both liquids and gases TVP Schut, D Alveringh, W Sparreboom, J Groenesteijn, RJ Wiegerink, ... 2018 IEEE Micro Electro Mechanical Systems (MEMS), 218-221, 2018 | 13 | 2018 |
A Large Range Multi-Axis Capacitive Force/Torque Sensor Realized in a Single SOI Wafer D Alveringh, RA Brookhuis, RJ Wiegerink, GJM Krijnen The 27th IEEE International Conference on Micro Electro Mechanical Systems …, 2014 | 13 | 2014 |
Improved capacitive detection method for Coriolis mass flow sensors enabling range/sensitivity tuning D Alveringh, J Groenesteijn, RJ Wiegerink, JC Lötters Microelectronic engineering 159, 1-5, 2016 | 12 | 2016 |
Inline pressure sensing mechanisms enabling scalable range and sensitivity D Alveringh, J Groenesteijn, RJ Wiegerink, JC Lötters 2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015 | 7 | 2015 |
Micro Coriolis MASS flow sensor driven by integrated PZT thin film actuators Y Zeng, J Groenesteijn, D Alveringh, RJA Steenwelle, K Ma, RJ Wiegerink, ... 2018 IEEE Micro Electro Mechanical Systems (MEMS), 850-853, 2018 | 6 | 2018 |
Universal modular fluidic and electronic interfacing platform for microfluidic devices D Alveringh, RGP Sanders, J Groenesteijn, TSJ Lammerink, RJ Wiegerink, ... 3rd Conference on MicroFluidic Handling Systems, MFHS 2017: Conference …, 2017 | 6 | 2017 |
Single-chip mass flow controller with integrated coriolis flow sensor and proportional control valve J Groenesteijn, D Alveringh, MS Groen, RJ Wiegerink, JC Lötters 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016 | 6 | 2016 |
Integrated throughflow mechanical microfluidic sensors D Alveringh | 4 | 2018 |
Fluid classification with integrated flow and pressure sensors using machine learning D Alveringh, DV Le, J Groenesteijn, J Schmitz, JC Lötters Sensors and Actuators A: Physical 363, 114762, 2023 | 3 | 2023 |
A miniature microclimate thermal flow sensor for horticultural applications D Alveringh, DG Bijsterveld, TE van den Berg, HW Veltkamp, ... 2022 IEEE Sensors, 1-4, 2022 | 3 | 2022 |
A novel capacitive detection principle for Coriolis mass flow sensors enabling range/sensitivity tuning D Alveringh, J Groenesteijn, K Ma, RJ Wiegerink, JC Lötters Proceedings of Micro and Nano Engineering, 2015 | 3 | 2015 |
Miniature robust high-bandwidth force sensor with mechanically amplified piezoresistive readout D Alveringh, DL Van Der Ven, HW Veltkamp, KM Batenburg, ... 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems …, 2022 | 2 | 2022 |
Inline relative permittivity sensing using silicon electrodes realized in surface channel technology D Alveringh, RJ Wiegerink, JC Lotters 2018 IEEE Micro Electro Mechanical Systems (MEMS), 840-843, 2018 | 2 | 2018 |
Vortex generation and sensing in microfabricated surface channels D Alveringh, RGP Sanders, RJ Wiegerink, JC Lötters 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016 | 2 | 2016 |
Towards system-level modeling and characterization of components for intravenous therapy D Alveringh, RJ Wiegerink, JC Lötters The 2nd International Conference on MicroFluidic Handling Systems (MFHS 2014), 2014 | 2 | 2014 |