Resistive pressure sensors integrated with a coriolis mass flow sensor D Alveringh, TVP Schut, RJ Wiegerink, W Sparreboom, JC Lötters 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 21 | 2017 |
μ-Coriolis mass flow sensor with resistive readout T Schut, R Wiegerink, J Lötters Micromachines 11 (2), 184, 2020 | 15 | 2020 |
Fully integrated mass flow, pressure, density and viscosity sensor for both liquids and gases TVP Schut, D Alveringh, W Sparreboom, J Groenesteijn, RJ Wiegerink, ... 2018 IEEE Micro Electro Mechanical Systems (MEMS), 218-221, 2018 | 13 | 2018 |
μ-Coriolis mass flow sensor with differential capacitive readout TVP Schut, RJ Wiegerink, JC Lötters IEEE sensors journal 21 (5), 5886-5894, 2020 | 8 | 2020 |
μ-Coriolis mass flow sensor with improved flow sensitivity through modelling of the sensor TVP Schut, RJ Wiegerink, JC Lötters Microelectronic Engineering 226, 111289, 2020 | 6 | 2020 |
A MEMS Coriolis mass flow sensing system with combined drive and sense interface AC De Oliveira, TVP Schut, J Groenesteijn, Q Fan, RJ Wiegerink, ... 2019 IEEE SENSORS, 1-4, 2019 | 6 | 2019 |
Magnetic field strength improvement for Lorentz actuation of a μ-Coriolis mass flow sensor TVP Schut, YP Klein, RJ Wiegerink, JC Lotters Microelectronic engineering 224, 111236, 2020 | 5 | 2020 |
Heavily-doped bulk silicon sidewall electrodes embedded between free-hanging microfluidic channels by modified surface channel technology Y Zhao, HW Veltkamp, TVP Schut, RGP Sanders, B Breazu, ... Micromachines 11 (6), 561, 2020 | 4 | 2020 |
Highly-doped bulk silicon microheaters and electrodes embedded between free-hanging microfluidic channels by surface channel technology Y Zhao, HW Veltkamp, TVP Schut, J Groenesteijn, MJ de Boer, ... 4th Conference on MicroFluidic Handling Systems, MFHS 2019, 2019 | 1 | 2019 |
Micro Coriolis mass flow sensor with integrated resistive pressure sensors J Groenesteijn, D Alveringh, TVP Schut, RJ Wiegerink, W Sparreboom, ... 3rd Conference on MicroFluidic Handling Systems, MFHS 2017, 2017 | 1 | 2017 |
Coriolis mass flow and density sensor actuation using a phase-locked loop D Alveringh, T Schut, RJ Wiegerink, JC Lötters The 3rd Conference on MicroFluidic Handling Systems, MFHS 2017: Conference …, 2017 | 1 | 2017 |
Micro-coriolis mass flow sensor with strain measurement devices J Groenesteijn, JC Lötters, TVP Schut, RJ Wiegerink US Patent App. 17/424,662, 2022 | | 2022 |
Towards a thermal noise limited micro-coriolis mass flow sensor TVP Schut | | 2021 |
Highly-doped in-plane Si electrodes embedded between free-hanging microfluidic channels Y Zhao, HW Veltkamp, TVP Schut, J Groenesteijn, MJ de Boer, ... 45th International Conference on Micro-and Nano-Engineering, MNE 2019, 2019 | | 2019 |
A MEMS Coriolis Mass Flow Sensing System with Combined Drive and Sense Interface AC Oliveira Alves, TVP Schut, J Groenesteijn, Q Fan, RJ Wiegerink, ... 2019 IEEE Sensors, SENSORS 2019-Conference Proceedings 2019, 2019 | | 2019 |
Sensing of multiple parameters in a micro-fabricated flow system T Schut University of Twente, 2017 | | 2017 |