Plasma electronics: applications in microelectronic device fabrication T Makabe, ZL Petrovic
CRC Press, 2006
533 2006 Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma T Kitajima, Y Takeo, ZL Petrović, T Makabe
Applied Physics Letters 77 (4), 489-491, 2000
270 2000 Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz T Makabe, N Nakano, Y Yamaguchi
Physical Review A 45 (4), 2520, 1992
169 1992 Simulations of rf glow discharges in SF 6 by the relaxation continuum model: Physical structure and function of the narrow-gap reactive-ion etcher N Nakano, N Shimura, ZL Petrović, T Makabe
Physical Review E 49 (5), 4455, 1994
141 1994 Transport coefficients and scattering cross-sections for plasma modelling in CF4-Ar mixtures: a swarm analysis M Kurihara, ZL Petrovic, T Makabe
Journal of Physics D: Applied Physics 33 (17), 2146, 2000
137 2000 The effect of topographical local charging on the etching of deep-submicron structures in J Matsui, N Nakano, ZL Petrović, T Makabe
Applied Physics Letters 78 (7), 883-885, 2001
109 2001 Kinetic phenomena in electron transport in radio-frequency fields ZL Petrović, ZM Raspopović, S Dujko, T Makabe
Applied surface science 192 (1-4), 1-25, 2002
102 2002 Effect of O2 (a 1 Δg M Shibata, N Nakano, T Makabe
Journal of applied physics 80 (11), 6142-6147, 1996
101 1996 Modeling of a rf glow discharge plasma K Okazaki, T Makabe, Y Yamaguchi
Applied physics letters 54 (18), 1742-1744, 1989
95 1989 Study of the structure in rf glow discharges in SiH4 /H2 by spatiotemporal optical emission spectroscopy: Influence of negative ions F Tochikubo, A Suzuki, S Kakuta, Y Terazono, T Makabe
Journal of applied physics 68 (11), 5532-5539, 1990
93 1990 Spatiotemporal optical emission spectroscopy of rf discharges in SF6 ZL Petrović, F Tochikubo, S Kakuta, T Makabe
Journal of applied physics 73 (5), 2163-2172, 1993
92 1993 Functional design of a pulsed two-frequency capacitively coupled plasma in K Maeshige, G Washio, T Yagisawa, T Makabe
Journal of applied physics 91 (12), 9494-9501, 2002
85 2002 Two-dimensional CT images of two-frequency capacitively coupled plasma T Kitajima, Y Takeo, T Makabe
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 17 (5 …, 1999
84 1999 Diffusion tensor in electron transport in gases in a radio-frequency field K Maeda, T Makabe, N Nakano, S Bzenic-acute, ZL Petrovic-acute
Physical Review E 55 (5), 5901, 1997
82 1997 O2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing M Shibata, N Nakano, T Makabe
Journal of applied physics 77 (12), 6181-6187, 1995
82 1995 Two-dimensional self-consistent simulation of a DC magnetron discharge E Shidoji, H Ohtake, N Nakano, T Makabe
Japanese journal of applied physics 38 (4R), 2131, 1999
80 1999 Functional separation in two frequency operation of an inductively coupled plasma T Denda, Y Miyoshi, Y Komukai, T Goto, ZL Petrović, T Makabe
Journal of applied physics 95 (3), 870-876, 2004
79 2004 Investigation of the high-frequency glow discharge in Ar at 13.56 MHz by spatiotemporal optical emission spectroscopy F Tochikubo, T Kokubo, S Kakuta, A Suzuki, T Makabe
Journal of Physics D: Applied Physics 23 (9), 1184, 1990
78 1990 Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies ZL Petrović, ZM Raspopović, VD Stojanović, JV Jovanović, G Malović, ...
Applied surface science 253 (16), 6619-6640, 2007
75 2007 Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar M Tadokoro, H Hirata, N Nakano, ZL Petrović, T Makabe
Physical Review E 58 (6), 7823, 1998
75 1998 