Prominent radiative contributions from multiply-excited states in laser-produced tin plasma for nanolithography F Torretti, J Sheil, R Schupp, MM Basko, M Bayraktar, RA Meijer, S Witte, ...
Nature communications 11 (1), 2334, 2020
84 2020 Extreme ultraviolet light from a tin plasma driven by a 2-µm-wavelength laser L Behnke, R Schupp, Z Bouza, M Bayraktar, Z Mazzotta, R Meijer, J Sheil, ...
Optics express 29 (3), 4475-4487, 2021
39 2021 Sources for beyond extreme ultraviolet lithography and water window imaging G O’Sullivan, B Li, P Dunne, P Hayden, D Kilbane, R Lokasani, E Long, ...
Physica Scripta 90 (5), 054002, 2015
35 2015 EUV spectroscopy of highly charged J Scheers, C Shah, A Ryabtsev, H Bekker, F Torretti, J Sheil, DA Czapski, ...
Physical Review A 101 (6), 062511, 2020
29 2020 Radiation transport and scaling of optical depth in Nd: YAG laser-produced microdroplet-tin plasma R Schupp, F Torretti, RA Meijer, M Bayraktar, J Sheil, J Scheers, ...
Applied Physics Letters 115 (12), 2019
29 2019 High-energy ions from Nd: YAG laser ablation of tin microdroplets: comparison between experiment and a single-fluid hydrodynamic model DJ Hemminga, L Poirier, MM Basko, R Hoekstra, W Ubachs, ...
Plasma Sources Science and Technology 30 (10), 105006, 2021
25 2021 Microdroplet-tin plasma sources of EUV radiation driven by solid-state-lasers (topical review) OO Versolato, J Sheil, S Witte, W Ubachs, R Hoekstra
Journal of Optics 24 (5), 054014, 2022
22 2022 Characterization of 1- and R Schupp, L Behnke, J Sheil, Z Bouza, M Bayraktar, W Ubachs, ...
Physical Review Research 3 (1), 013294, 2021
22 2021 Early-time hydrodynamic response of a tin droplet driven by laser-produced plasma J Hernandez-Rueda, B Liu, DJ Hemminga, Y Mostafa, RA Meijer, ...
Physical Review Research 4 (1), 013142, 2022
19 2022 Characterization of angularly resolved EUV emission from 2-µm-wavelength laser-driven Sn plasmas using preformed liquid disk targets R Schupp, L Behnke, Z Bouza, Z Mazzotta, Y Mostafa, A Lassise, L Poirier, ...
Journal of Physics D: Applied Physics 54 (36), 365103, 2021
18 2021 Analysis of soft x-ray emission spectra of laser-produced dysprosium, erbium and thulium plasmas J Sheil, P Dunne, T Higashiguchi, D Kos, E Long, T Miyazaki, F O’Reilly, ...
Journal of Physics B: Atomic, Molecular and Optical Physics 50 (6), 065006, 2017
13 2017 Multiply-excited states and their contribution to opacity in CO2 laser-driven tin-plasma conditions J Sheil, OO Versolato, AJ Neukirch, J Colgan
Journal of Physics B: Atomic, Molecular and Optical Physics 54 (3), 035002, 2021
11 2021 EUV spectroscopy of Sn5+–Sn10+ ions in an electron beam ion trap and laser-produced plasmas Z Bouza, J Scheers, A Ryabtsev, R Schupp, L Behnke, C Shah, J Sheil, ...
Journal of physics B: atomic, molecular and optical physics 53 (19), 195001, 2020
11 2020 Strongly anisotropic ion emission in the expansion of Nd: YAG-laser-produced plasma L Poirier, DJ Hemminga, A Lassise, L Assink, R Hoekstra, J Sheil, ...
Physics of Plasmas 29 (12), 2022
9 2022 The spectrum of a 1-μm-wavelength-driven tin microdroplet laser-produced plasma source in the 5.5–265.5 nm wavelength range Z Bouza, J Byers, J Scheers, R Schupp, Y Mostafa, L Behnke, Z Mazzotta, ...
AIP advances 11 (12), 2021
9 2021 Soft x-ray spectral analysis of samarium plasmas produced by solid-state laser pulses R Lokasani, J Sheil, EF Barte, H Hara, T Tamura, T Gisuji, T Higashiguchi, ...
Journal of Physics B: Atomic, Molecular and Optical Physics 51 (21), 215001, 2018
6 2018 Simulations of plasmas driven by laser wavelengths in the 1.064—10.6 μm range for their characterization as future extreme ultraviolet light sources DJ Hemminga, OO Versolato, J Sheil
Physics of Plasmas 30 (3), 2023
5 2023 Evidence of production of keV Sn+ ions in the H2 buffer gas surrounding an Sn-plasma EUV source S Rai, KI Bijlsma, L Poirier, E De Wit, L Assink, A Lassise, I Rabadán, ...
Plasma Sources Science and Technology 32 (3), 035006, 2023
3 2023 Spall-velocity reduction in double-pulse impact on tin microdroplets RA Meijer, R Schupp, J Sheil, MM Basko, KSE Eikema, OO Versolato, ...
Physical Review Applied 16 (2), 024026, 2021
3 2021 Spectroscopy of highly charged ions for extreme ultraviolet lithography G O'Sullivan, P Dunne, T Higashiguchi, D Kos, O Maguire, T Miyazaki, ...
Nuclear Instruments and Methods in Physics Research Section B: Beam …, 2017
3 2017 